Emiko Ono

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Joetsu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polymer, chemically amplified resist composition and patterning pro...
- Patent number 12,032,289
- Issue date Jul 9, 2024
- Shin-Etsu Chemical Co., Ltd.
- Masahiro Fukushima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Salt compound, chemically amplified resist composition, and pattern...
- Patent number 11,435,666
- Issue date Sep 6, 2022
- Shin-Etsu Chemical Co., Ltd.
- Emiko Ono
- C07 - ORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
POLYMER, CHEMICALLY AMPLIFIED RESIST COMPOSITION AND PATTERNING PRO...
- Publication number 20210096465
- Publication date Apr 1, 2021
- Shin-Etsu Chemical Co., Ltd.
- Masahiro Fukushima
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
NOVEL SALT COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND P...
- Publication number 20200159115
- Publication date May 21, 2020
- Shin-Etsu Chemical Co., Ltd.
- Emiko Ono
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PREPARATION OF POLYMER AND POLYMER
- Publication number 20200140592
- Publication date May 7, 2020
- Shin-Etsu Chemical Co., Ltd.
- Teppei Adachi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY