Emily Chiu

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Chupei-City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Scatterometry modeling in the presence of undesired diffraction orders
- Patent number 11,422,095
- Issue date Aug 23, 2022
- KLA Corporation
- Phillip Atkins
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Calibration Of Parametric Measurement Models Based On In-Line Wafer...
- Publication number 20240102941
- Publication date Mar 28, 2024
- KLA Corporation
- Brian C. Lin
- G01 - MEASURING TESTING
Information Patent Application
Scatterometry Modeling in the Presence of Undesired Diffraction Orders
- Publication number 20200232909
- Publication date Jul 23, 2020
- KLA-Tencor Corporation
- Phillip Atkins
- G01 - MEASURING TESTING