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Emily E. Fisch
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Burlington, VT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Etch apparatus
Patent number
7,332,054
Issue date
Feb 19, 2008
International Business Machines Corporation
Arne W. Ballantine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
EUVL mask structure and method of formation
Patent number
6,777,137
Issue date
Aug 17, 2004
International Business Machines Corporation
Emily E. Fisch
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Etch process and apparatus therefor
Patent number
6,699,400
Issue date
Mar 2, 2004
Arne W. Ballantine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Array foreshortening measurement using a critical dimension scannin...
Patent number
6,683,306
Issue date
Jan 27, 2004
International Business Machines Corporation
Reginald R. Bowley
G01 - MEASURING TESTING
Information
Patent Grant
Structure for lithographic focus control features
Patent number
6,577,406
Issue date
Jun 10, 2003
International Business Machines Corporation
James A. Bruce
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self-aligned trench capacitor capping process for high density DRAM...
Patent number
6,372,573
Issue date
Apr 16, 2002
Kabushiki Kaisha Toshiba
Masami Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and method for detection of physical interference during...
Patent number
6,282,459
Issue date
Aug 28, 2001
International Business Machines Corporation
Arne W. Ballantine
G01 - MEASURING TESTING
Information
Patent Grant
Sonic cleaning with an interference signal
Patent number
6,276,370
Issue date
Aug 21, 2001
International Business Machines Corporation
Emily E. Fisch
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
ETCH APPARATUS
Publication number
20080066864
Publication date
Mar 20, 2008
Arne W. Ballantine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etch process and apparatus therefor
Publication number
20040144750
Publication date
Jul 29, 2004
Arne W. Ballantine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUVL mask structure and method of formation
Publication number
20040009408
Publication date
Jan 15, 2004
International Business Machines Corporation
Emily E. Fisch
B82 - NANO-TECHNOLOGY
Information
Patent Application
Process and apparatus for contacting a precision surface with liqui...
Publication number
20030196679
Publication date
Oct 23, 2003
International Business Machines Corporation
John Michael Cotte
B08 - CLEANING
Information
Patent Application
Array foreshortening measurement using a critical dimension scannin...
Publication number
20020185598
Publication date
Dec 12, 2002
International Business Machines Corporation
Reginald R. Bowley
G01 - MEASURING TESTING
Information
Patent Application
Structure for lithographic focus control features
Publication number
20020122187
Publication date
Sep 5, 2002
James A. Bruce
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SELF-ALIGNED TRENCH CAPACITOR CAPPING PROCESS FOR HIGH DENSITY DRAM...
Publication number
20010039088
Publication date
Nov 8, 2001
MASAMI AOKI
H01 - BASIC ELECTRIC ELEMENTS