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Emmanuel P. Guidotti
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Barberaz, FR
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Patents Grants
last 30 patents
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Patent Grant
Film precursor tray for use in a film precursor evaporation system...
Patent number
7,708,835
Issue date
May 4, 2010
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for increasing deposition rates of metal layers from metal-c...
Patent number
7,678,421
Issue date
Mar 16, 2010
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of improving surface morphology and reducing resistivity of...
Patent number
6,121,140
Issue date
Sep 19, 2000
Tokyo Electron Limited
Chantal Arena
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of eliminating edge effect in chemical vapor deposition of a...
Patent number
6,090,705
Issue date
Jul 18, 2000
Tokyo Electron Limited
Chantal Arena
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR INCREASING DEPOSITION RATES OF METAL LAYERS FROM METAL-C...
Publication number
20080003360
Publication date
Jan 3, 2008
TOKYO ELECTRON LIMITED
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film precursor tray for use in a film precursor evaporation system...
Publication number
20060185598
Publication date
Aug 24, 2006
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...