Emmanuil Choumas

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Werdenberg, CH

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Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PRODUCING EPITAXIAL LAYERS
- Publication number 20110017127
- Publication date Jan 27, 2011
- EpiSpeed SA
- Hans von Kanel
- C30 - CRYSTAL GROWTH
Information Patent Application
CLEANING MEANS FOR LARGE AREA PECVD DEVICES USING A REMOTE PLASMA S...
- Publication number 20080035169
- Publication date Feb 14, 2008
- OC OERLIKON BALZERS AG
- Filippos Farmakis
- B08 - CLEANING