TREA

En-Tien Tan

Follow

Person

  • Hsinchu, TW
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Dispensing system of a coater
    • Patent number 6,099,646
    • Issue date Aug 8, 2000
    • United Microelectronics Corp.
    • Ming-Che Yang
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Dispense system of a photoresist coating machine
    • Patent number 6,062,442
    • Issue date May 16, 2000
    • United Microelectronics Corp.
    • Ming-Che Yang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    SOG coater nozzle pot
    • Patent number 6,048,399
    • Issue date Apr 11, 2000
    • United Microelectronics Corp.
    • En-Tien Tan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Stepper vacuum chuck wiper
    • Patent number 5,740,580
    • Issue date Apr 21, 1998
    • United Microelectronics Corporation
    • Chung-Chien Leu
    • B08 - CLEANING

Patents Applicationslast 30 patents