Enden David Liu

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam substrate inspection using both vector and ra...
- Patent number 9,620,332
- Issue date Apr 11, 2017
- Multibeam Corporation
- David K. Lam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam substrate inspection using both vector and ra...
- Patent number 9,466,463
- Issue date Oct 11, 2016
- Multibeam Corporation
- David K. Lam
- H01 - BASIC ELECTRIC ELEMENTS