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Eng T. Gaw
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San Jose, CA, US
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last 30 patents
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Patent Grant
Lithography using a new phase-shifting reticle
Patent number
5,633,102
Issue date
May 27, 1997
Intel Corporation
Kenny K. H. Toh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle with structurally identical inverted phase-shifted features
Patent number
5,384,219
Issue date
Jan 24, 1995
Intel Corporation
Giang T. Dao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle with structurally identical inverted phase-shifted features
Patent number
5,348,826
Issue date
Sep 20, 1994
Intel Corporation
Giang T. Dao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of fabrication of inverted phase-shifted reticle
Patent number
5,300,379
Issue date
Apr 5, 1994
Intel Corporation
Giang T. Dao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY