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Engelbertus A.F. van de Pasch
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Oirschot, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Object positioning method for a lithographic projection apparatus
Patent number
7,397,940
Issue date
Jul 8, 2008
ASML Netherlands B.V.
Marcus J. H. Willems van Dijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method, dev...
Patent number
6,747,729
Issue date
Jun 8, 2004
ASML Netherlands B.V.
Wouter Onno Pril
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Crash prevention in positioning apparatus for use in lithographic p...
Patent number
6,498,350
Issue date
Dec 24, 2002
ASML Netherlands B.V.
Yim Bun P. Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus
Patent number
6,392,738
Issue date
May 21, 2002
ASML Netherlands B.V.
Engelbertus A. F. van de Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic projection apparatus, device manufacturing method, dev...
Publication number
20020045113
Publication date
Apr 18, 2002
Wouter Onno Pril
C01 - INORGANIC CHEMISTRY
Information
Patent Application
Object positioning method for a lithographic projection apparatus
Publication number
20010014170
Publication date
Aug 16, 2001
Marcus J.H. Willems van Dijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Crash prevention in positioning apparatus for use in lithographic p...
Publication number
20010004105
Publication date
Jun 21, 2001
Yim Bun P. Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY