Engelbertus Antonius Fransiscus Van Der Pasch

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Oirschot, NL

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Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170242349
- Publication date Aug 24, 2017
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METHOD OF DEFORMING A SUBSTRATE TABLE AND D...
- Publication number 20120327386
- Publication date Dec 27, 2012
- ASML NETHERLANDS B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus having encoder type position sensor system
- Publication number 20080291413
- Publication date Nov 27, 2008
- ASML NETHERLANDS B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Displacement measurement systems lithographic apparatus and device...
- Publication number 20070223007
- Publication date Sep 27, 2007
- ASML NETHERLANDS B.V.
- Renatus Gerardus Klaver
- G01 - MEASURING TESTING
Information Patent Application
Position measurement system and lithographic apparatus
- Publication number 20070052976
- Publication date Mar 8, 2007
- ASML NETHERLANDS B.V.
- Wouter Onno Pril
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY