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Engelbertus Johannes Jeroen Klijntunte
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Veldhoven, NL
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last 30 patents
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Patent Grant
Device and method for manipulation and routing of a metrology beam
Patent number
7,177,059
Issue date
Feb 13, 2007
ASML Netherlands B.V.
Engelbertus Antonius Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
Device and method for manipulation and routing of a metrology beam
Publication number
20040233494
Publication date
Nov 25, 2004
ASML NETHERLANDS B.V.
Engelbertus Antonius Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY