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Enrico Mosca
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Ossining, NY, US
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last 30 patents
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Patent Grant
Method for processing a substrate
Patent number
7,419,702
Issue date
Sep 2, 2008
Tokyo Electron Limited
Kazuhito Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Low-pressure deposition of ruthenium and rhenium metal layers from...
Publication number
20060068588
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for processing a substrate
Publication number
20050221002
Publication date
Oct 6, 2005
TOKYO ELECTRON LIMITED
Kazuhito Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...