Eran Chason

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Spring Grove, SG

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Patents Grantslast 30 patents

Information Patent Grant
Critical dimension uniformity correction by scanner signature control
- Patent number 9,134,112
- Issue date Sep 15, 2015
- Carl Zeiss SMS Ltd
- Ofir Sharoni
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CRITICAL DIMENSION UNIFORMITY CORRECTION BY SCANNER SIGNATURE CONTROL
- Publication number 20130077101
- Publication date Mar 28, 2013
- Ofir Sharoni
- G01 - MEASURING TESTING