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Erdinc Karakas
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Hillsboro, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods of surface restoration for nitride etching
Patent number
10,811,273
Issue date
Oct 20, 2020
Tokyo Electron Limited
Christopher Talone
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of conformal etching selective to other materials
Patent number
10,699,911
Issue date
Jun 30, 2020
Tokyo Electron Limited
Erdinc Karakas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of plasma etching of silicon-containing organic film using s...
Patent number
10,529,589
Issue date
Jan 7, 2020
Tokyo Electron Limited
Erdinc Karakas
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of Conformal Etching Selective To Other Materials
Publication number
20190139779
Publication date
May 9, 2019
TOKYO ELECTRON LIMITED
Erdinc Karakas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods of Surface Restoration for Nitride Etching
Publication number
20190080926
Publication date
Mar 14, 2019
TOKYO ELECTRON LIMITED
Christopher Talone
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PLASMA ETCHING OF SILICON-CONTAINING ORGANIC FILM USING S...
Publication number
20180358233
Publication date
Dec 13, 2018
TOKYO ELECTRON LIMITED
Erdinc Karakas
H01 - BASIC ELECTRIC ELEMENTS