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Erez Graitzer
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Doar Na Misgav, IL
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Patents Grants
last 30 patents
Information
Patent Grant
Optical system and method for correcting mask defects using the system
Patent number
11,249,294
Issue date
Feb 15, 2022
Carl Zeiss SMT GmbH
Markus Seesselberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Analyses of measurement data
Patent number
9,207,530
Issue date
Dec 8, 2015
Carl Zeiss SMS Ltd
Vladimir Dmitriev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic targets for uniformity control
Patent number
8,871,409
Issue date
Oct 28, 2014
Carl Zeiss SMS Ltd
Rainer Pforr
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for DUV transmission mapping
Patent number
8,592,770
Issue date
Nov 26, 2013
Carl Zeiss SMS Ltd
Guy Ben-Zvi
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for mapping of line-width size distributions o...
Patent number
8,421,026
Issue date
Apr 16, 2013
Carl Zeiss SMS Ltd
Guy Ben-Zvi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL SYSTEM AND METHOD FOR CORRECTING MASK DEFECTS USING THE SYSTEM
Publication number
20190170991
Publication date
Jun 6, 2019
Carl Zeiss SMT GMBH
Markus Seesselberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC TARGETS FOR UNIFORMITY CONTROL
Publication number
20130295698
Publication date
Nov 7, 2013
Rainer Pforr
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ANALYSES OF MEASUREMENT DATA
Publication number
20130028505
Publication date
Jan 31, 2013
Vladimir Dmitriev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR MAPPING OF LINE-WIDTH SIZE DISTRIBUTIONS O...
Publication number
20110122395
Publication date
May 26, 2011
Guy Ben-Zvi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR DUV TRANSMISSION MAPPING
Publication number
20110101226
Publication date
May 5, 2011
Guy Ben-Zvi
G01 - MEASURING TESTING