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Method of forming silicon oxide containing films
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Patent number 8,613,976
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Issue date Dec 24, 2013
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L'Air Liquide, SociétéAnonyme pour l'Etude et l'Exploitation des Procédés Geo...
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Christian Dussarrat
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of forming silicon oxide containing films
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Patent number 8,227,032
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Issue date Jul 24, 2012
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L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
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Christian Dussarrat
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for forming dielectric or metallic films
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Patent number 7,482,286
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Issue date Jan 27, 2009
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L'Air Liquide, Societe Anonyme a Directoire et Conseil de Surveillance pour l...
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Ashutosh Misra
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...