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Eric A. Terbeek
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Transport chamber and method for making same
Patent number
6,305,565
Issue date
Oct 23, 2001
Lam Research Corporation
Trace L. Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transport chamber and method for making same
Patent number
6,216,328
Issue date
Apr 17, 2001
Lam Research Corporation
Trace L. Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber interfacing O-rings and method for implementing same
Patent number
6,010,133
Issue date
Jan 4, 2000
Lam Research Corporation
Trace L. Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber interfacing O-rings and method for implementing same
Patent number
5,746,434
Issue date
May 5, 1998
Lam Research Corporation
Trace L. Boyd
H01 - BASIC ELECTRIC ELEMENTS