Eric Askarinam

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma reactor having an inductive antenna coupling power through a...
- Patent number 6,623,596
- Issue date Sep 23, 2003
- Applied Materials, Inc.
- Kenneth S. Collins
- A21 - BAKING EDIBLE DOUGHS
Information Patent Grant
Parallel-plate electrode plasma reactor having an inductive antenna...
- Patent number 6,524,432
- Issue date Feb 25, 2003
- Applied Materials Inc.
- Kenneth Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal control apparatus for inductively coupled RF plasma reactor...
- Patent number 6,514,376
- Issue date Feb 4, 2003
- Applied Materials Inc.
- Kenneth Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inductively coupled RF Plasma reactor having an overhead solenoidal...
- Patent number 6,454,898
- Issue date Sep 24, 2002
- Applied Materials, Inc.
- Kenneth Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber having improved temperature control
- Patent number 6,440,221
- Issue date Aug 27, 2002
- Applied Materials, Inc.
- Shamouil Shamouilian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing chamber having multi-mode access
- Patent number 6,095,083
- Issue date Aug 1, 2000
- Applied Materiels, Inc.
- Michael Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor having an inductive antenna coupling power through a...
- Patent number 6,077,384
- Issue date Jun 20, 2000
- Applied Materials, Inc.
- Kenneth S. Collins
- A21 - BAKING EDIBLE DOUGHS
Information Patent Grant
Inductively coupled RF plasma reactor having an overhead solenoidal...
- Patent number 6,074,512
- Issue date Jun 13, 2000
- Applied Materials, Inc.
- Kenneth Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal control apparatus for inductively coupled RF plasma reactor...
- Patent number 6,063,233
- Issue date May 16, 2000
- Applied Materials, Inc.
- Kenneth Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Parallel plate electrode plasma reactor having an inductive antenna...
- Patent number 6,054,013
- Issue date Apr 25, 2000
- Applied Materials, Inc.
- Kenneth Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective collar for vacuum seal in a plasma etch reactor
- Patent number 5,722,668
- Issue date Mar 3, 1998
- Applied Materials, Inc.
- Michael Rice
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESS CHAMBER HAVING IMPROVED TEMPERATURE CONTROL
- Publication number 20010042594
- Publication date Nov 22, 2001
- SHAMOUIL SHAMOUILIAN
- H01 - BASIC ELECTRIC ELEMENTS

Eric Askarinam

Person

Patents Grantslast 30 patents

Plasma reactor having an inductive antenna coupling power through a...

Parallel-plate electrode plasma reactor having an inductive antenna...

Thermal control apparatus for inductively coupled RF plasma reactor...

Inductively coupled RF Plasma reactor having an overhead solenoidal...

Process chamber having improved temperature control

Vacuum processing chamber having multi-mode access

Plasma reactor having an inductive antenna coupling power through a...

Inductively coupled RF plasma reactor having an overhead solenoidal...

Thermal control apparatus for inductively coupled RF plasma reactor...

Parallel plate electrode plasma reactor having an inductive antenna...

Protective collar for vacuum seal in a plasma etch reactor

Patents Applicationslast 30 patents

PROCESS CHAMBER HAVING IMPROVED TEMPERATURE CONTROL