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Eric C. Shurtliff
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Phoenix, AZ, US
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last 30 patents
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Patent Grant
Workpiece cleaning element with improved rib configuration
Patent number
6,006,391
Issue date
Dec 28, 1999
SpeedFam-IPEC Corporation
Eric Shurtliff
B08 - CLEANING
Information
Patent Grant
Method and apparatus for enhanced cleaning of a workpiece with mech...
Patent number
5,975,094
Issue date
Nov 2, 1999
Speedfam Corporation
Eric C. Shurtliff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for cleaning and drying wafers
Patent number
5,950,327
Issue date
Sep 14, 1999
SpeedFam-IPEC Corporation
Glenn E. Peterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for rinsing wafers in the context of a combined cleaning...
Patent number
5,899,216
Issue date
May 4, 1999
Speedfam Corporation
Chad Goudie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for cleaning wafers and discs
Patent number
5,870,792
Issue date
Feb 16, 1999
Speedfam Corporation
Eric C. Shurtliff
B08 - CLEANING