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Eric Cotte
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Dresden, DE
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last 30 patents
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Patent Grant
Overlay sampling reduction
Patent number
9,881,122
Issue date
Jan 30, 2018
GLOBALFOUNDRIES Inc.
Hariharasudhan Kathiresan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Asymmetric reticle heating of multilayer reticles eliminated by dum...
Patent number
9,091,943
Issue date
Jul 28, 2015
GLOBALFOUNDRIES Inc.
Arthur Hotzel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for the reproducible determination of the position of struct...
Patent number
8,352,886
Issue date
Jan 8, 2013
KLA-Tencor MIE GmbH
Frank Laske
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
OVERLAY SAMPLING REDUCTION
Publication number
20170286586
Publication date
Oct 5, 2017
GLOBALFOUNDRIES INC.
Hariharasudhan KATHIRESAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ASYMMETRIC RETICLE HEATING OF MULTILAYER RETICLES ELIMINATED BY DUM...
Publication number
20140185030
Publication date
Jul 3, 2014
GLOBALFOUNDRIES INC.
Arthur HOTZEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for the Reproducible Determination of the Position of Struct...
Publication number
20110225554
Publication date
Sep 15, 2011
KLA-TENCOR MIE GMBH
Frank Laske
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY