Eric EVA

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate for a reflective optical element
- Patent number 11,987,521
- Issue date May 21, 2024
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Optical element and lithography system
- Patent number 11,874,525
- Issue date Jan 16, 2024
- Carl Zeiss SMT GmbH
- Eric Eva
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Component for a mirror array for EUV lithography
- Patent number 11,126,087
- Issue date Sep 21, 2021
- Carl Zeiss SMT GmbH
- Eric Eva
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method for repairing reflective optical elements for EUV lithography
- Patent number 11,099,484
- Issue date Aug 24, 2021
- Carl Zeiss SMT GmbH
- Robert Meier
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical manipulator, projection lens and projection exposure apparatus
- Patent number 10,976,667
- Issue date Apr 13, 2021
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Reflective optical element for EUV lithography
- Patent number 10,649,340
- Issue date May 12, 2020
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for loading a blank composed of fused silica with hydrogen,...
- Patent number 10,427,965
- Issue date Oct 1, 2019
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Method and apparatus for determining the absorption in a blank
- Patent number 9,036,152
- Issue date May 19, 2015
- Carl Zeiss SMT GmbH
- Eric Eva
- G01 - MEASURING TESTING
Information Patent Grant
Optical element and method
- Patent number 8,891,172
- Issue date Nov 18, 2014
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Lens blank and lens elements as well as method for their production
- Patent number 8,780,448
- Issue date Jul 15, 2014
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Optical element and method
- Patent number 8,508,854
- Issue date Aug 13, 2013
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Lens blank and lens elements as well as method for their production
- Patent number 8,174,771
- Issue date May 8, 2012
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Method for manufacturing a lens of synthetic quartz glass with incr...
- Patent number 7,934,390
- Issue date May 3, 2011
- Carl Zeiss SMT GmbH
- Eric Eva
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Optical composite material and method for its production
- Patent number 7,907,347
- Issue date Mar 15, 2011
- Carl Zeiss SMT AG
- Eric Eva
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Lens blank and lens elements as well as method for their production
- Patent number 7,791,811
- Issue date Sep 7, 2010
- Carl Zeiss SMT AG
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Method and apparatus for setting optical imaging properties by mean...
- Patent number 7,352,452
- Issue date Apr 1, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G01 - MEASURING TESTING
Information Patent Grant
Attenuating filter for ultraviolet light
- Patent number 7,196,842
- Issue date Mar 27, 2007
- Carl Zeiss SMT AG
- Bernhard Weigl
- G02 - OPTICS
Information Patent Grant
Device for reducing the peak power of a pulsed laser light source
- Patent number 6,996,141
- Issue date Feb 7, 2006
- Carl Zeiss SMT AG
- Karl-Heinz Schuster
- G02 - OPTICS
Information Patent Grant
Projection optical system
- Patent number 6,992,753
- Issue date Jan 31, 2006
- Carl Zeiss SMT AG
- Daniel Krähmer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of making a fracture-resistant calcium fluoride single cryst...
- Patent number 6,740,159
- Issue date May 25, 2004
- Schott Glas
- Joerg Kandler
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT WITH COOLING CHANNELS, AND OPTICAL ARRANGEMENT
- Publication number 20240219849
- Publication date Jul 4, 2024
- Carl Zeiss SMT GMBH
- Eric EVA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PRODUCING A MIRROR OF A LITHOGRAPHY SYSTEM
- Publication number 20240027730
- Publication date Jan 25, 2024
- Carl Zeiss SMT GMBH
- Christoph Zaczek
- G02 - OPTICS
Information Patent Application
METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXP...
- Publication number 20240019613
- Publication date Jan 18, 2024
- Carl Zeiss SMT GMBH
- Christoph Zaczek
- G02 - OPTICS
Information Patent Application
METHOD FOR PRODUCING A MULTI-PART MIRROR OF A PROJECTION ILLUMINATI...
- Publication number 20230375939
- Publication date Nov 23, 2023
- Carl Zeiss SMT GMBH
- Christoph Zaczek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT AND LITHOGRAPHY SYSTEM
- Publication number 20220299731
- Publication date Sep 22, 2022
- Carl Zeiss SMT GMBH
- Eric Eva
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE FOR A REFLECTIVE OPTICAL ELEMENT
- Publication number 20210116616
- Publication date Apr 22, 2021
- Carl Zeiss SMT GMBH
- Eric EVA
- G02 - OPTICS
Information Patent Application
METHOD FOR REPAIRING REFLECTIVE OTPICAL ELEMENTS FOR EUV LITHOGRAPHY
- Publication number 20190302628
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Robert MEIER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPONENT FOR A MIRROR ARRAY FOR EUV LITHOGRAPHY
- Publication number 20190212654
- Publication date Jul 11, 2019
- Carl Zeiss SMT GMBH
- Eric EVA
- G02 - OPTICS
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY
- Publication number 20190171108
- Publication date Jun 6, 2019
- Carl Zeiss SMT GMBH
- Dirk Heinrich EHM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL MANIPULATOR, PROJECTION LENS AND PROJECTION EXPOSURE APPARATUS
- Publication number 20170108780
- Publication date Apr 20, 2017
- Carl Zeiss SMT GMBH
- Eric EVA
- G02 - OPTICS
Information Patent Application
METHOD FOR LOADING A BLANK COMPOSED OF FUSED SILICA WITH HYDROGEN,...
- Publication number 20160145137
- Publication date May 26, 2016
- Carl Zeiss SMT GMBH
- Eric EVA
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING THE ABSORPTION IN A BLANK
- Publication number 20140192344
- Publication date Jul 10, 2014
- Carl Zeiss SMT GMBH
- Eric EVA
- G02 - OPTICS
Information Patent Application
LENS BLANK AND LENS ELEMENTS AS WELL AS METHOD FOR THEIR PRODUCTION
- Publication number 20120218643
- Publication date Aug 30, 2012
- Carl Zeiss SMT GMBH
- Eric EVA
- G02 - OPTICS
Information Patent Application
METHOD FOR MANUFACTURING A LENS OF SYNTHETIC QUARTZ GLASS WITH INCR...
- Publication number 20110203320
- Publication date Aug 25, 2011
- Carl Zeiss SMT GMBH
- Eric EVA
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
OPTICAL ELEMENT AND METHOD
- Publication number 20110080569
- Publication date Apr 7, 2011
- Carl Zeiss SMT GMBH
- Eric Eva
- G02 - OPTICS
Information Patent Application
LENS BLANK AND LENS ELEMENTS AS WELL AS METHOD FOR THEIR PRODUCTION
- Publication number 20100296160
- Publication date Nov 25, 2010
- Carl Zeiss SMT AG
- Eric Eva
- G02 - OPTICS
Information Patent Application
PROJECTION LENS FOR MICROLITHOGRAPHY AND CORRESPONDING TERMINAL ELE...
- Publication number 20100149500
- Publication date Jun 17, 2010
- Carl Zeiss SMT AG
- Eric Eva
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT AND METHOD
- Publication number 20090257032
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Eric Eva
- G02 - OPTICS
Information Patent Application
Optical composite material and method for its production
- Publication number 20090036289
- Publication date Feb 5, 2009
- Carl Zeiss SMT AG
- Eric Eva
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LENS BLANK AND LENS ELEMENTS AS WELL AS METHOD FOR THEIR PRODUCTION
- Publication number 20080018992
- Publication date Jan 24, 2008
- Carl Zeiss SMT AG
- Eric Eva
- G02 - OPTICS
Information Patent Application
METHOD FOR MANUFACTURING A LENS OF SYNTHETIC QUARTZ GLASS WITH INC...
- Publication number 20070266733
- Publication date Nov 22, 2007
- Carl Zeiss SMT AG
- Eric Eva
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Projection lens and method for performing microlithography
- Publication number 20070195307
- Publication date Aug 23, 2007
- Carl Zeiss SMT AG
- Karl-Heinz Schuster
- G02 - OPTICS
Information Patent Application
Method and apparatus for setting optical imaging properties by mean...
- Publication number 20060118703
- Publication date Jun 8, 2006
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G02 - OPTICS
Information Patent Application
Attenuating filter for ultraviolet light
- Publication number 20050179996
- Publication date Aug 18, 2005
- Carl Zeiss SMT AG
- Bernhard Weigl
- G02 - OPTICS
Information Patent Application
Projection optical system
- Publication number 20050140954
- Publication date Jun 30, 2005
- Carl Zeiss SMT AG
- Daniel Krahmer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for producing radiation-resistant quartz glass material, and...
- Publication number 20040250572
- Publication date Dec 16, 2004
- Carl Zeiss SMT AG
- Ralf Lindner
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Method of making a fracture-resistant calcium fluoride single cryst...
- Publication number 20030101923
- Publication date Jun 5, 2003
- Joerg Kandler
- C30 - CRYSTAL GROWTH
Information Patent Application
Attenuating filter for ultraviolet light
- Publication number 20020191310
- Publication date Dec 19, 2002
- CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Bernhard Weigl
- G02 - OPTICS

Person

Patents Grantslast 30 patents

Substrate for a reflective optical element

Optical element and lithography system

Component for a mirror array for EUV lithography

Method for repairing reflective optical elements for EUV lithography

Optical manipulator, projection lens and projection exposure apparatus

Reflective optical element for EUV lithography

Method for loading a blank composed of fused silica with hydrogen,...

Method and apparatus for determining the absorption in a blank

Optical element and method

Lens blank and lens elements as well as method for their production

Optical element and method

Lens blank and lens elements as well as method for their production

Method for manufacturing a lens of synthetic quartz glass with incr...

Optical composite material and method for its production

Lens blank and lens elements as well as method for their production

Method and apparatus for setting optical imaging properties by mean...

Attenuating filter for ultraviolet light

Device for reducing the peak power of a pulsed laser light source

Projection optical system

Method of making a fracture-resistant calcium fluoride single cryst...

Patents Applicationslast 30 patents

OPTICAL ELEMENT WITH COOLING CHANNELS, AND OPTICAL ARRANGEMENT

METHOD FOR PRODUCING A MIRROR OF A LITHOGRAPHY SYSTEM

METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXP...

METHOD FOR PRODUCING A MULTI-PART MIRROR OF A PROJECTION ILLUMINATI...

OPTICAL ELEMENT AND LITHOGRAPHY SYSTEM

SUBSTRATE FOR A REFLECTIVE OPTICAL ELEMENT

METHOD FOR REPAIRING REFLECTIVE OTPICAL ELEMENTS FOR EUV LITHOGRAPHY

COMPONENT FOR A MIRROR ARRAY FOR EUV LITHOGRAPHY

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY

OPTICAL MANIPULATOR, PROJECTION LENS AND PROJECTION EXPOSURE APPARATUS

METHOD FOR LOADING A BLANK COMPOSED OF FUSED SILICA WITH HYDROGEN,...

METHOD AND APPARATUS FOR DETERMINING THE ABSORPTION IN A BLANK

LENS BLANK AND LENS ELEMENTS AS WELL AS METHOD FOR THEIR PRODUCTION

METHOD FOR MANUFACTURING A LENS OF SYNTHETIC QUARTZ GLASS WITH INCR...

OPTICAL ELEMENT AND METHOD

LENS BLANK AND LENS ELEMENTS AS WELL AS METHOD FOR THEIR PRODUCTION

PROJECTION LENS FOR MICROLITHOGRAPHY AND CORRESPONDING TERMINAL ELE...

OPTICAL ELEMENT AND METHOD

Optical composite material and method for its production

LENS BLANK AND LENS ELEMENTS AS WELL AS METHOD FOR THEIR PRODUCTION

METHOD FOR MANUFACTURING A LENS OF SYNTHETIC QUARTZ GLASS WITH INC...

Projection lens and method for performing microlithography

Method and apparatus for setting optical imaging properties by mean...

Attenuating filter for ultraviolet light

Projection optical system

Method for producing radiation-resistant quartz glass material, and...

Method of making a fracture-resistant calcium fluoride single cryst...

Attenuating filter for ultraviolet light