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Eric Henri Jan Hendrickx
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Lubbeck, BE
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last 30 patents
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Patent Grant
Method and apparatus for photolithographic imaging
Patent number
12,117,730
Issue date
Oct 15, 2024
ASML Netherlands B.V.
Joern-Holger Franke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inverse lithography for high transmission attenuated phase shift ma...
Patent number
8,510,686
Issue date
Aug 13, 2013
IMEC
Eric Henri Jan Hendrickx
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of making alternating phase shift masks
Patent number
7,761,837
Issue date
Jul 20, 2010
IMEC
Lieve Van Look
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR PHOTOLITHOGRAPHIC IMAGING
Publication number
20220236645
Publication date
Jul 28, 2022
ASML NETHERLANDS B.V.
Joern-Holger FRANKE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alternating phase shift mask
Publication number
20070087273
Publication date
Apr 19, 2007
Lieve Van Look
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Marker structure, mask pattern, alignment method and lithographic m...
Publication number
20050031969
Publication date
Feb 10, 2005
ASML NETHERLANDS B.V.
Jozef Maria Finders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY