Eric Hermanson

Person

Georgetown, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cover ring to mitigate carbon contamination in plasma doping chamber
- Patent number 12,165,852
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Vikram M. Bhosle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System using pixelated faraday sensor
- Patent number 11,810,754
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Eric D. Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle yield via beam-line pressure control
- Patent number 11,562,885
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Thomas Stacy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic filter providing reduced particle generation
- Patent number 11,437,215
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Foam in ion implantation system
- Patent number 11,222,768
- Issue date Jan 11, 2022
- Varian Semiconductor Equipment Associates, Inc.
- James Alan Pixley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual cathode ion source
- Patent number 11,114,277
- Issue date Sep 7, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam quality control using a movable mass resolving device
- Patent number 11,049,691
- Issue date Jun 29, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-current ion implanter and method for controlling ion beam usin...
- Patent number 11,011,343
- Issue date May 18, 2021
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic filter and ion implanter having asymmetric electrosta...
- Patent number 10,886,098
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic element having grooved exterior surface
- Patent number 10,867,772
- Issue date Dec 15, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Eric Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual cathode ion source
- Patent number 10,741,361
- Issue date Aug 11, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Foam in ion implantation system
- Patent number 10,643,823
- Issue date May 5, 2020
- Varian Semiconductor Equipment Associates, Inc.
- James Alan Pixley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive beam optic containing internal heating element
- Patent number 10,504,682
- Issue date Dec 10, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual cathode ion source
- Patent number 10,446,372
- Issue date Oct 15, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF clean system for electrostatic elements
- Patent number 10,410,844
- Issue date Sep 10, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput substrate handling endstation and sequence
- Patent number 10,157,763
- Issue date Dec 18, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryopump arrangement for improved pump speed
- Patent number 10,119,529
- Issue date Nov 6, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Steven C. Borichevsky
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Dual cathode ion source
- Patent number 9,978,554
- Issue date May 22, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Connector for process chamber electrostatic elements
- Patent number 9,613,778
- Issue date Apr 4, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Mayur Jagtap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linkage conduit for vacuum chamber applications
- Patent number 9,484,183
- Issue date Nov 1, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for protecting a superconducting (SC) tape
- Patent number 9,008,740
- Issue date Apr 14, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Gregory Citver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam measurement system and method
- Patent number 8,698,108
- Issue date Apr 15, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Joseph P. Dzengeleski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deceleration lens
- Patent number 8,481,960
- Issue date Jul 9, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interfacing two insulation parts in high voltage environment
- Patent number 8,455,760
- Issue date Jun 4, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Insulator system for a terminal structure of an ion implantation sy...
- Patent number 8,143,604
- Issue date Mar 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Russell Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interfacing two insulation parts in high voltage environment
- Patent number 7,863,520
- Issue date Jan 4, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Techniques for making high voltage connections
- Patent number 7,863,531
- Issue date Jan 4, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Douglas E. May
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Terminal structures of an ion implanter having insulated conductors...
- Patent number 7,842,934
- Issue date Nov 30, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Kasegn D. Tekletsadik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulated conducting device with multiple insulation segments
- Patent number 7,799,999
- Issue date Sep 21, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Kasegn D. Tekletsadik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply for an ion implantation system
- Patent number 7,576,337
- Issue date Aug 18, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Piotr Lubicki
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY
- Publication number 20240087839
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Dawei Sun
- G02 - OPTICS
Information Patent Application
COVER RING TO MITIGATE CARBON CONTAMINATION IN PLASMA DOPING CHAMBER
- Publication number 20230282451
- Publication date Sep 7, 2023
- Applied Materials, Inc.
- Vikram M. Bhosle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM USING PIXELATED FARADAY SENSOR
- Publication number 20230187171
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Eric D. Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE YIELD VIA BEAM-LINE PRESSURE CONTROL
- Publication number 20220037114
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Thomas Stacy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC FILTER PROVIDING REDUCED PARTICLE GENERATION
- Publication number 20210183609
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-CURRENT ION IMPLANTER AND METHOD FOR CONTROLLING ION BEAM USIN...
- Publication number 20210020399
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual Cathode Ion Source
- Publication number 20200294765
- Publication date Sep 17, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC FILTER AND ION IMPLANTER HAVING ASYMMETRIC ELECTROSTA...
- Publication number 20200161077
- Publication date May 21, 2020
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOAM IN ION IMPLANTATION SYSTEM
- Publication number 20200083021
- Publication date Mar 12, 2020
- Varian Semiconductor Equipment Associates, Inc.
- James Alan Pixley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOAM IN ION IMPLANTATION SYSTEM
- Publication number 20200083027
- Publication date Mar 12, 2020
- Varian Semiconductor Equipment Associates, Inc.
- James Alan Pixley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC ELEMENT HAVING GROOVED EXTERIOR SURFACE
- Publication number 20200020508
- Publication date Jan 16, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Eric Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual Cathode Ion Source
- Publication number 20190385811
- Publication date Dec 19, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDUCTIVE BEAM OPTIC CONTAINING INTERNAL HEATING ELEMENT
- Publication number 20190259560
- Publication date Aug 22, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Quality Control Using A Movable Mass Resolving Device
- Publication number 20190198292
- Publication date Jun 27, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual Cathode Ion Source
- Publication number 20180211808
- Publication date Jul 26, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF CLEAN SYSTEM FOR ELECTROSTATIC ELEMENTS
- Publication number 20180166261
- Publication date Jun 14, 2018
- Kevin Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cryopump Arrangement For Improved Pump Speed
- Publication number 20160273526
- Publication date Sep 22, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Steven C. Borichevsky
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
LINKAGE CONDUIT FOR VACUUM CHAMBER APPLICATIONS
- Publication number 20160071686
- Publication date Mar 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT SUBSTRATE HANDLING ENDSTATION AND SEQUENCE
- Publication number 20150063954
- Publication date Mar 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mitchell
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Techniques for Protecting a superconducting (SC) Tape
- Publication number 20130130913
- Publication date May 23, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Gregory Citver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DECELERATION LENS
- Publication number 20120001087
- Publication date Jan 5, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACING TWO INSULATION PARTS IN HIGH VOLTAGE ENVIRONMENT
- Publication number 20110094798
- Publication date Apr 28, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TECHNIQUES FOR MAKING HIGH VOLTAGE CONNECTIONS
- Publication number 20110094862
- Publication date Apr 28, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Douglas E. May
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR MAKING HIGH VOLTAGE CONNECTIONS
- Publication number 20090078554
- Publication date Mar 26, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Douglas E. May
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Terminal Structures Of An Ion Implanter Having Insulated Conductors...
- Publication number 20090057572
- Publication date Mar 5, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Kasegn D. Tekletsadik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR TERMINAL INSULATION IN AN ION IMPLANTER
- Publication number 20090057573
- Publication date Mar 5, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Russell John LOW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATED CONDUCTING DEVICE WITH MULTIPLE INSULATION SEGMENTS
- Publication number 20090050347
- Publication date Feb 26, 2009
- Kasegn D. Tekletsadik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACING TWO INSULATION PARTS IN HIGH VOLTAGE ENVIRONMENT
- Publication number 20090047801
- Publication date Feb 19, 2009
- Russell J. Low
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Power Supply for an Ion Implantation System
- Publication number 20080164408
- Publication date Jul 10, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Piotr R. Lubicki
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Insulator system for a terminal structure of an ion implantation sy...
- Publication number 20070235663
- Publication date Oct 11, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Russell Low
- H01 - BASIC ELECTRIC ELEMENTS

Eric Hermanson

Person

Patents Grantslast 30 patents

Cover ring to mitigate carbon contamination in plasma doping chamber

System using pixelated faraday sensor

Particle yield via beam-line pressure control

Electrostatic filter providing reduced particle generation

Foam in ion implantation system

Dual cathode ion source

Ion beam quality control using a movable mass resolving device

High-current ion implanter and method for controlling ion beam usin...

Electrostatic filter and ion implanter having asymmetric electrosta...

Electrostatic element having grooved exterior surface

Dual cathode ion source

Foam in ion implantation system

Conductive beam optic containing internal heating element

Dual cathode ion source

RF clean system for electrostatic elements

High throughput substrate handling endstation and sequence

Cryopump arrangement for improved pump speed

Dual cathode ion source

Connector for process chamber electrostatic elements

Linkage conduit for vacuum chamber applications

Techniques for protecting a superconducting (SC) tape

Ion beam measurement system and method

Deceleration lens

Interfacing two insulation parts in high voltage environment

Insulator system for a terminal structure of an ion implantation sy...

Interfacing two insulation parts in high voltage environment

Techniques for making high voltage connections

Terminal structures of an ion implanter having insulated conductors...

Insulated conducting device with multiple insulation segments

Power supply for an ion implantation system

Patents Applicationslast 30 patents

MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY

COVER RING TO MITIGATE CARBON CONTAMINATION IN PLASMA DOPING CHAMBER

SYSTEM USING PIXELATED FARADAY SENSOR

PARTICLE YIELD VIA BEAM-LINE PRESSURE CONTROL

ELECTROSTATIC FILTER PROVIDING REDUCED PARTICLE GENERATION

HIGH-CURRENT ION IMPLANTER AND METHOD FOR CONTROLLING ION BEAM USIN...

Dual Cathode Ion Source

ELECTROSTATIC FILTER AND ION IMPLANTER HAVING ASYMMETRIC ELECTROSTA...

FOAM IN ION IMPLANTATION SYSTEM

FOAM IN ION IMPLANTATION SYSTEM

ELECTROSTATIC ELEMENT HAVING GROOVED EXTERIOR SURFACE

Dual Cathode Ion Source

CONDUCTIVE BEAM OPTIC CONTAINING INTERNAL HEATING ELEMENT

Ion Beam Quality Control Using A Movable Mass Resolving Device

Dual Cathode Ion Source

RF CLEAN SYSTEM FOR ELECTROSTATIC ELEMENTS

Cryopump Arrangement For Improved Pump Speed

LINKAGE CONDUIT FOR VACUUM CHAMBER APPLICATIONS

HIGH THROUGHPUT SUBSTRATE HANDLING ENDSTATION AND SEQUENCE

Techniques for Protecting a superconducting (SC) Tape

DECELERATION LENS

INTERFACING TWO INSULATION PARTS IN HIGH VOLTAGE ENVIRONMENT

TECHNIQUES FOR MAKING HIGH VOLTAGE CONNECTIONS

TECHNIQUES FOR MAKING HIGH VOLTAGE CONNECTIONS

Terminal Structures Of An Ion Implanter Having Insulated Conductors...

TECHNIQUES FOR TERMINAL INSULATION IN AN ION IMPLANTER

INSULATED CONDUCTING DEVICE WITH MULTIPLE INSULATION SEGMENTS

INTERFACING TWO INSULATION PARTS IN HIGH VOLTAGE ENVIRONMENT

Power Supply for an Ion Implantation System

Insulator system for a terminal structure of an ion implantation sy...