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Eric Hong
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Gyeonggi-do, KR
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last 30 patents
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Patent Grant
Post-etch residue removal for advanced node beol processing
Patent number
10,790,187
Issue date
Sep 29, 2020
Entegris, Inc.
Emanuel I. Cooper
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Grant
Cleaning compositions for removing post etch residue
Patent number
10,577,567
Issue date
Mar 3, 2020
Entegris, Inc.
Makonnen Payne
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
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Patent Application
POST-ETCH RESIDUE REMOVAL FOR ADVANCED NODE BEOL PROCESSING
Publication number
20180204764
Publication date
Jul 19, 2018
Entegris, Inc.
Emanuel I. Cooper
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING COMPOSITIONS FOR REMOVING POST ETCH RESIDUE
Publication number
20180148669
Publication date
May 31, 2018
Entegris, Inc.
Makonnen Payne
H01 - BASIC ELECTRIC ELEMENTS