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Eric J. Malstrom
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Austin, TX, US
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last 30 patents
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Patent Grant
Thermal processing furnace, gas delivery system therefor, and metho...
Patent number
7,910,494
Issue date
Mar 22, 2011
Tokyo Electron Limited
Anthony Dip
C30 - CRYSTAL GROWTH
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last 30 patents
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Patent Application
THERMAL PROCESSING FURNACE, GAS DELIVERY SYSTEM THEREFOR, AND METHO...
Publication number
20070231757
Publication date
Oct 4, 2007
TOKYO ELECTRON LIMITED
Anthony Dip
C30 - CRYSTAL GROWTH