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Eric Jos Anton Brouwer
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Den Bosch, NL
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Patents Grants
last 30 patents
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Patent Grant
Metrology apparatus and method for determining a characteristic rel...
Patent number
11,385,554
Issue date
Jul 12, 2022
ASML Netherlands B.V.
Miguel Garcia Granda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and patterning devices and apparatuses for measuring focus...
Patent number
10,895,811
Issue date
Jan 19, 2021
ASML Netherlands B.V.
Miguel Garcia Granda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement method, inspection apparatus, patterning device, lithog...
Patent number
10,691,030
Issue date
Jun 23, 2020
ASML Netherlands B.V.
Frank Staals
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of determining dose and focus, inspection apparatus, pattern...
Patent number
9,964,853
Issue date
May 8, 2018
ASML Netherlands B.V.
Peter Clement Paul Vanoppen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Methods and Patterning Devices and Apparatuses for Measuring Focus...
Publication number
20200117101
Publication date
Apr 16, 2020
ASML NETHERLANDS B.V.
Miguel GARCIA GRANDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Apparatus and Method for Determining a Characteristic Rel...
Publication number
20200026182
Publication date
Jan 23, 2020
ASML NETHERLANDS B.V.
Miguel GARCIA GRANDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT METHOD, INSPECTION APPARATUS, PATTERNING DEVICE, LITHOG...
Publication number
20190171114
Publication date
Jun 6, 2019
ASML NETHERLANDS B.V.
Frank STAALS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Determining Dose and Focus, Inspection Apparatus, Pattern...
Publication number
20150293458
Publication date
Oct 15, 2015
ASML NETHERLANDS B.V.
Peter Clement Paul Vanoppen
G01 - MEASURING TESTING