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Eric Lau
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Control of processing parameters for substrate polishing with angul...
Patent number
11,931,853
Issue date
Mar 19, 2024
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Grant
Asymmetry correction via oriented wafer loading
Patent number
11,869,815
Issue date
Jan 9, 2024
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Grant
Asymmetry correction via variable relative velocity of a wafer
Patent number
11,764,069
Issue date
Sep 19, 2023
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Retaining ring design
Patent number
11,400,560
Issue date
Aug 2, 2022
Applied Materials, Inc.
Jeonghoon Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Asymmetry correction via oriented wafer loading
Patent number
11,282,755
Issue date
Mar 22, 2022
Applied Materials, Inc.
Eric Lau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing system with local area rate control and oscillation mode
Patent number
10,610,994
Issue date
Apr 7, 2020
Applied Materials, Inc.
Eric Lau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Textured small pad for chemical mechanical polishing
Patent number
10,589,399
Issue date
Mar 17, 2020
Applied Materials, Inc.
Jeonghoon Oh
B24 - GRINDING POLISHING
Information
Patent Grant
Local area polishing system and polishing pad assemblies for a poli...
Patent number
10,434,623
Issue date
Oct 8, 2019
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing automated recipe generation
Patent number
10,256,111
Issue date
Apr 9, 2019
Applied Materials, Inc.
Eric Lau
G01 - MEASURING TESTING
Information
Patent Grant
Orbital polishing with small pad
Patent number
10,076,817
Issue date
Sep 18, 2018
Applied Materials, Inc.
Hung Chih Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier for small pad for chemical mechanical polishing
Patent number
9,873,179
Issue date
Jan 23, 2018
Applied Materials, Inc.
Hui Chen
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR CONTROLLING SUBSTRATE POLISH EDGE UNIFORMITY
Publication number
20240253183
Publication date
Aug 1, 2024
Applied Materials, Inc.
Priscilla Michelle Diep LAROSA
B24 - GRINDING POLISHING
Information
Patent Application
ASYMMETRY CORRECTION VIA ORIENTED WAFER LOADING
Publication number
20240087965
Publication date
Mar 14, 2024
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Application
RETAINER FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD
Publication number
20240075584
Publication date
Mar 7, 2024
Applied Materials, Inc.
Andrew J. Nagengast
B24 - GRINDING POLISHING
Information
Patent Application
MINIMIZING SUBSTRATE BOW DURING POLISHING
Publication number
20240033878
Publication date
Feb 1, 2024
Applied Materials, Inc.
Eric L. Lau
B24 - GRINDING POLISHING
Information
Patent Application
COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM
Publication number
20230356354
Publication date
Nov 9, 2023
Applied Materials, Inc.
Jeonghoon Oh
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL
Publication number
20230356355
Publication date
Nov 9, 2023
Applied Materials, Inc.
Jeonghoon Oh
B24 - GRINDING POLISHING
Information
Patent Application
ASYMMETRY CORRECTION VIA VARIABLE RELATIVE VELOCITY OF A WAFER
Publication number
20220379428
Publication date
Dec 1, 2022
Applied Materials, Inc.
Jimin ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RETAINING RING DESIGN
Publication number
20220339755
Publication date
Oct 27, 2022
Applied Materials, Inc.
Jeonghoon OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF PROCESSING PARAMETERS FOR SUBSTRATE POLISHING WITH SUBST...
Publication number
20220283554
Publication date
Sep 8, 2022
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Application
MACHINE LEARNING FOR CLASSIFYING RETAINING RINGS
Publication number
20220281052
Publication date
Sep 8, 2022
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Application
CONTROL OF PROCESSING PARAMETERS FOR SUBSTRATE POLISHING WITH ANGUL...
Publication number
20220281053
Publication date
Sep 8, 2022
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Application
Asymmetry Correction Via Oriented Wafer Loading
Publication number
20220208621
Publication date
Jun 30, 2022
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Application
Asymmetry Correction Via Oriented Wafer Loading
Publication number
20210066142
Publication date
Mar 4, 2021
Applied Materials, Inc.
Eric Lau
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SPIRAL AND CONCENTRIC MOVEMENT DESIGNED FOR CMP LOCATION SPECIFIC P...
Publication number
20200282506
Publication date
Sep 10, 2020
Applied Materials, Inc.
Eric LAU
B24 - GRINDING POLISHING
Information
Patent Application
RETAINING RING DESIGN
Publication number
20190099857
Publication date
Apr 4, 2019
Applied Materials, Inc.
Jeonghoon OH
B24 - GRINDING POLISHING
Information
Patent Application
SPIRAL AND CONCENTRIC MOVEMENT DESIGNED FOR CMP LOCATION SPECIFIC P...
Publication number
20180250788
Publication date
Sep 6, 2018
Applied Materials, Inc.
Eric LAU
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING AUTOMATED RECIPE GENERATION
Publication number
20180005842
Publication date
Jan 4, 2018
Applied Materials, Inc.
Eric LAU
G01 - MEASURING TESTING
Information
Patent Application
POLISHING SYSTEM WITH LOCAL AREA RATE CONTROL AND OSCILLATION MODE
Publication number
20170274495
Publication date
Sep 28, 2017
Applied Materials, Inc.
Eric LAU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOCAL AREA POLISHING SYSTEM AND POLISHING PAD ASSEMBLIES FOR A POLI...
Publication number
20170274497
Publication date
Sep 28, 2017
Applied Materials, Inc.
Eric LAU
B24 - GRINDING POLISHING
Information
Patent Application
TEXTURED SMALL PAD FOR CHEMICAL MECHANICAL POLISHING
Publication number
20170274498
Publication date
Sep 28, 2017
Jeonghoon Oh
B24 - GRINDING POLISHING
Information
Patent Application
CARRIER FOR SMALL PAD FOR CHEMICAL MECHANICAL POLISHING
Publication number
20170203405
Publication date
Jul 20, 2017
Applied Materials, Inc.
Hui Chen
B24 - GRINDING POLISHING
Information
Patent Application
ORBITAL POLISHING WITH SMALL PAD
Publication number
20160016280
Publication date
Jan 21, 2016
Applied Materials, Inc.
Hung Chih Chen
H01 - BASIC ELECTRIC ELEMENTS