Eric Louis

Person

Ijsselstein, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Reflective optical element and method of manufacturing the same
- Patent number 8,638,494
- Issue date Jan 28, 2014
- Carl Zeiss SMT GmbH
- Tim Tsarfati
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Reflective optical element and method of manufacturing the same
- Patent number 8,411,355
- Issue date Apr 2, 2013
- Carl Zeiss SMT GmbH
- Tim Tsarfati
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Reflective optical element for EUV lithography device
- Patent number 8,144,830
- Issue date Mar 27, 2012
- Carl Zeiss GmbH
- Andrey E. Yakshin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multilayer system with protecting layer system and production method
- Patent number 7,261,957
- Issue date Aug 28, 2007
- Carl Zeiss SMT AG
- Frederik Bijkerk
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical element and method for its manufacture as well as lithograp...
- Patent number 7,172,788
- Issue date Feb 6, 2007
- Carl Zeiss SMT AG
- Andrey E. Yakshin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Multilayer system with protecting layer system and production method
- Patent number 6,656,575
- Issue date Dec 2, 2003
- Carl-Zeiss-Stiftung
- Frederik Bijkerk
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for the production of multi-layer systems
- Patent number 6,483,597
- Issue date Nov 19, 2002
- Carl-Zeiss-Stiftung
- Andrey E. Yakshin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
REFLECTIVE OPTICAL ELEMENT AND METHOD OF MANUFACTURING THE SAME
- Publication number 20130188248
- Publication date Jul 25, 2013
- Tim TSARFATI
- B82 - NANO-TECHNOLOGY
Information Patent Application
REFLECTIVE OPTICAL ELEMENT AND METHOD OF MANUFACTURING THE SAME
- Publication number 20110194087
- Publication date Aug 11, 2011
- Carl Zeiss SMT GMBH
- Tim TSARFATI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY DEVICE
- Publication number 20100027107
- Publication date Feb 4, 2010
- Carl Zeiss SMT AG
- Andrey E. Yakshin
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multilayer system with protecting layer system and production method
- Publication number 20070281109
- Publication date Dec 6, 2007
- Carl Zeiss SMT AG
- Frederik Bijkerk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Optical broad band element and process for its production
- Publication number 20050111083
- Publication date May 26, 2005
- Andrey E. Yakshin
- G02 - OPTICS
Information Patent Application
Process for manufacturing multilayer systems
- Publication number 20040245090
- Publication date Dec 9, 2004
- Andrey E. Yakshin
- G02 - OPTICS
Information Patent Application
Multi-layer mirror for radiation in the xuv wavelenght range and me...
- Publication number 20040233519
- Publication date Nov 25, 2004
- Frederik Bijkerk
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multilayer system with protecting layer system and production method
- Publication number 20040121134
- Publication date Jun 24, 2004
- Frederik Bijkerk
- G02 - OPTICS
Information Patent Application
Method for coating substrates and mask holder
- Publication number 20040052942
- Publication date Mar 18, 2004
- Frederik Bijkerk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multilayer system with protecting layer system and production method
- Publication number 20020012797
- Publication date Jan 31, 2002
- Frederik Bijkerk
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for the production of multi-layer systems
- Publication number 20010038456
- Publication date Nov 8, 2001
- Andrey E. Yakshin
- B82 - NANO-TECHNOLOGY

Person

Patents Grantslast 30 patents

Reflective optical element and method of manufacturing the same

Reflective optical element and method of manufacturing the same

Reflective optical element for EUV lithography device

Multilayer system with protecting layer system and production method

Optical element and method for its manufacture as well as lithograp...

Multilayer system with protecting layer system and production method

Method for the production of multi-layer systems

Patents Applicationslast 30 patents

REFLECTIVE OPTICAL ELEMENT AND METHOD OF MANUFACTURING THE SAME

REFLECTIVE OPTICAL ELEMENT AND METHOD OF MANUFACTURING THE SAME

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY DEVICE

Multilayer system with protecting layer system and production method

Optical broad band element and process for its production

Process for manufacturing multilayer systems

Multi-layer mirror for radiation in the xuv wavelenght range and me...

Multilayer system with protecting layer system and production method

Method for coating substrates and mask holder

Multilayer system with protecting layer system and production method

Method for the production of multi-layer systems