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Eric M. Gullikson
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Oakland, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Ultra-high density diffraction grating
Patent number
8,331,027
Issue date
Dec 11, 2012
The Regents of the University of California
Howard A. Padmore
B82 - NANO-TECHNOLOGY
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Patent Grant
Compensation of flare-induced CD changes EUVL
Patent number
6,815,129
Issue date
Nov 9, 2004
EUV LLC
John E. Bjorkholm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Ultra-high Density Diffraction Grating
Publication number
20100053611
Publication date
Mar 4, 2010
The Regents of the University of California
Howard A. Padmore
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL