Eric M. Lee

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-step system and method for curing a dielectric film
- Patent number 10,068,765
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Junjun Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Multi-step system and method for curing a dielectric film
- Patent number 9,443,725
- Issue date Sep 13, 2016
- Tokyo Electron Limited
- Junjun Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Chemical vapor deposition method
- Patent number 9,212,420
- Issue date Dec 15, 2015
- Tokyo Electron Limited
- Eric M. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step system and method for curing a dielectric film
- Patent number 9,184,047
- Issue date Nov 10, 2015
- Tokyo Electron Limited
- Junjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor deposition system
- Patent number 9,157,152
- Issue date Oct 13, 2015
- Tokyo Electron Limited
- Jacques Faguet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for chemical vapor deposition control
- Patent number 9,139,910
- Issue date Sep 22, 2015
- Tokyo Electron Limited
- Eric M. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing system for curing dielectric films
- Patent number 8,956,457
- Issue date Feb 17, 2015
- Tokyo Electron Limited
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for controlling pattern and structure formation b...
- Patent number 8,916,055
- Issue date Dec 23, 2014
- Tokyo Electron Limited
- Jozef Brcka
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Grant
Dielectric treatment module using scanning IR radiation source
- Patent number 8,895,942
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Junjun Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for chemical vapor deposition control
- Patent number 8,852,347
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Eric M. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step system and method for curing a dielectric film
- Patent number 8,642,488
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Junjun Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Treatment of low dielectric constant films using a batch processing...
- Patent number 8,039,049
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing a pore-generating material from an uncured low-...
- Patent number 7,977,256
- Issue date Jul 12, 2011
- Tokyo Electron Limited
- Junjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma-assisted vapor phase treatment of low dielectric constant fi...
- Patent number 7,901,743
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for curing a porous low dielectric constant dielectric film
- Patent number 7,858,533
- Issue date Dec 28, 2010
- Tokyo Electron Limited
- Junjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of integrating an air gap structure with a substrate
- Patent number 7,855,123
- Issue date Dec 21, 2010
- Tokyo Electron Limited
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-step system and method for curing a dielectric film
- Patent number 7,622,378
- Issue date Nov 24, 2009
- Tokyo Electron Limited
- Junjun Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Plural treatment step process for treating dielectric films
- Patent number 7,405,168
- Issue date Jul 29, 2008
- Tokyo Electron Limited
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure comprising tunable anti-reflective coating and method of...
- Patent number 7,199,046
- Issue date Apr 3, 2007
- Tokyo Electron Ltd.
- Jeffrey T. Wetzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure comprising amorphous carbon film and method of forming th...
- Patent number 7,115,993
- Issue date Oct 3, 2006
- Tokyo Electron Limited
- Jeffrey T. Wetzel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM
- Publication number 20160314966
- Publication date Oct 27, 2016
- TOKYO ELECTRON LIMITED
- Junjun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM
- Publication number 20160027641
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Junjun LIU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND DEVICE FOR CONTROLLING PATTERN AND STRUCTURE FORMATION B...
- Publication number 20150152556
- Publication date Jun 4, 2015
- TOKYO ELECTRON LIMITED
- Jozef Brcka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM
- Publication number 20140109432
- Publication date Apr 24, 2014
- TOKYO ELECTRON LIMITED
- Junjun Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND DEVICE FOR CONTROLLING PATTERN AND STRUCTURE FORMATION B...
- Publication number 20130217210
- Publication date Aug 22, 2013
- TOKYO ELECTRON LIMITED
- Jozef Brcka
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Application
METHOD OF OPERATING FILAMENT ASSISTED CHEMICAL VAPOR DEPOSITION SYSTEM
- Publication number 20120213929
- Publication date Aug 23, 2012
- TOKYO ELECTRON LIMITED
- Eric M. LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for chemical vapor deposition control
- Publication number 20110303145
- Publication date Dec 15, 2011
- TOKYO ELECTRON LIMITED
- Eric M. LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for chemical vapor deposition control
- Publication number 20110305831
- Publication date Dec 15, 2011
- TOKYO ELECTRON LIMITED
- Eric M. LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION SYSTEM
- Publication number 20110126762
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Jacques Faguet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of integrating an air gap structure with a substrate
- Publication number 20100248443
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical vapor deposition method
- Publication number 20100247803
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Eric M. LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC TREATMENT PLATFORM FOR DIELECTRIC FILM DEPOSITION AND CU...
- Publication number 20100068897
- Publication date Mar 18, 2010
- TOKYO ELECTRON LIMITED
- Junjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC MATERIAL TREATMENT SYSTEM AND METHOD OF OPERATING
- Publication number 20100065758
- Publication date Mar 18, 2010
- TOKYO ELECTRON LIMITED
- Junjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC TREATMENT MODULE USING SCANNING IR RADIATION SOURCE
- Publication number 20100065759
- Publication date Mar 18, 2010
- TOKYO ELECTRON LIMITED
- Junjun Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
IR LASER OPTICS SYSTEM FOR DIELECTRIC TREATMENT MODULE
- Publication number 20100067886
- Publication date Mar 18, 2010
- TOKYO ELECTRON LIMITED
- Junjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM
- Publication number 20100041248
- Publication date Feb 18, 2010
- TOKYO ELECTRON LIMITED
- Junjun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING A PORE-GENERATING MATERIAL FROM AN UNCURED LOW-...
- Publication number 20090227118
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Junjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TREATING A DIELECTRIC FILM WITH INFRARED RADIATION
- Publication number 20090226695
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Junjun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POROUS SiCOH-CONTAINING DIELECTRIC FILM AND A METHOD OF PREPARING
- Publication number 20090226694
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Junjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CURING A POROUS LOW DIELECTRIC CONSTANT DIELECTRIC FILM
- Publication number 20090227119
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Junjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for curing a dielectric film
- Publication number 20090075491
- Publication date Mar 19, 2009
- TOKYO ELECTRON LIMITED
- Junjun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing system for curing dielectric films
- Publication number 20080063809
- Publication date Mar 13, 2008
- TOKYO ELECTRON LIMITED
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-step system and method for curing a dielectric film
- Publication number 20070105401
- Publication date May 10, 2007
- TOKYO ELECTRON LIMITED
- Junjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plural treatment step process for treating dielectric films
- Publication number 20070077781
- Publication date Apr 5, 2007
- TOKYO ELECTRON LIMTED
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma-assisted vapor phase treatment of low dielectric constant fi...
- Publication number 20070077353
- Publication date Apr 5, 2007
- TOKYO ELECTRON LIMITED
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Treatment of low dielectric constant films using a batch processing...
- Publication number 20070077782
- Publication date Apr 5, 2007
- TOKYO ELECTRON LIMITED
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure comprising tunable anti-reflective coating and method of...
- Publication number 20050230677
- Publication date Oct 20, 2005
- TOKYO ELECTRON LIMITED
- Jeffrey T. Wetzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure comprising amorphous carbon film and method of forming th...
- Publication number 20050167839
- Publication date Aug 4, 2005
- TOKYO ELECTRON LIMITED
- Jeffrey T. Wetzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure comprising tunable anti-reflective coating and method of...
- Publication number 20050104150
- Publication date May 19, 2005
- TOKYO ELECTRON LIMITED
- Jeffrey T. Wetzel
- H01 - BASIC ELECTRIC ELEMENTS

Eric M. Lee

Person

Patents Grantslast 30 patents

Multi-step system and method for curing a dielectric film

Multi-step system and method for curing a dielectric film

Chemical vapor deposition method

Multi-step system and method for curing a dielectric film

Vapor deposition system

Method for chemical vapor deposition control

Thermal processing system for curing dielectric films

Method and device for controlling pattern and structure formation b...

Dielectric treatment module using scanning IR radiation source

Apparatus for chemical vapor deposition control

Multi-step system and method for curing a dielectric film

Treatment of low dielectric constant films using a batch processing...

Method for removing a pore-generating material from an uncured low-...

Plasma-assisted vapor phase treatment of low dielectric constant fi...

Method for curing a porous low dielectric constant dielectric film

Method of integrating an air gap structure with a substrate

Multi-step system and method for curing a dielectric film

Plural treatment step process for treating dielectric films

Structure comprising tunable anti-reflective coating and method of...

Structure comprising amorphous carbon film and method of forming th...

Patents Applicationslast 30 patents

MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM

MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM

METHOD AND DEVICE FOR CONTROLLING PATTERN AND STRUCTURE FORMATION B...

MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM

METHOD AND DEVICE FOR CONTROLLING PATTERN AND STRUCTURE FORMATION B...

METHOD OF OPERATING FILAMENT ASSISTED CHEMICAL VAPOR DEPOSITION SYSTEM

Apparatus for chemical vapor deposition control

Method for chemical vapor deposition control

VAPOR DEPOSITION SYSTEM

Method of integrating an air gap structure with a substrate

Chemical vapor deposition method

DIELECTRIC TREATMENT PLATFORM FOR DIELECTRIC FILM DEPOSITION AND CU...

DIELECTRIC MATERIAL TREATMENT SYSTEM AND METHOD OF OPERATING

DIELECTRIC TREATMENT MODULE USING SCANNING IR RADIATION SOURCE

IR LASER OPTICS SYSTEM FOR DIELECTRIC TREATMENT MODULE

MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM

METHOD FOR REMOVING A PORE-GENERATING MATERIAL FROM AN UNCURED LOW-...

METHOD FOR TREATING A DIELECTRIC FILM WITH INFRARED RADIATION

POROUS SiCOH-CONTAINING DIELECTRIC FILM AND A METHOD OF PREPARING

METHOD FOR CURING A POROUS LOW DIELECTRIC CONSTANT DIELECTRIC FILM

Method for curing a dielectric film

Thermal processing system for curing dielectric films

Multi-step system and method for curing a dielectric film

Plural treatment step process for treating dielectric films

Plasma-assisted vapor phase treatment of low dielectric constant fi...

Treatment of low dielectric constant films using a batch processing...

Structure comprising tunable anti-reflective coating and method of...

Structure comprising amorphous carbon film and method of forming th...

Structure comprising tunable anti-reflective coating and method of...