Eric Munro

Person

London, GB

People

Patents Grantslast 30 patents

Information Patent Grant
Holey mirror arrangement for dual-energy e-beam inspector
- Patent number 7,217,924
- Issue date May 15, 2007
- KLA-Tencor Technologies Corporation
- Marian Mankos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wien filter with reduced chromatic aberration
- Patent number 7,164,139
- Issue date Jan 16, 2007
- KLA-Tencor Technologies Corporation
- Gabor D. Toth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for E-beam dark field imaging
- Patent number 7,141,791
- Issue date Nov 28, 2006
- KLA-Tencor Technologies Corporation
- Douglas K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam lithography apparatus focused through spherical aberr...
- Patent number 6,620,565
- Issue date Sep 16, 2003
- Agere Systems, INC
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic energy filter
- Patent number 6,441,378
- Issue date Aug 27, 2002
- Jeol Ltd.
- Katsushige Tsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam lithography focusing through spherical aberration int...
- Patent number 6,440,620
- Issue date Aug 27, 2002
- Agere Systems, INC
- Victor Katsap
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam imaging apparatus
- Patent number 6,420,714
- Issue date Jul 16, 2002
- Agere Systems Guardian Corp.
- Victor Katsap
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam inspection system and method
- Patent number 5,578,821
- Issue date Nov 26, 1996
- KLA Instruments Corporation
- Dan Meisberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection system and method
- Patent number 5,502,306
- Issue date Mar 26, 1996
- KLA Instruments Corporation
- Dan Meisburger
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for e-beam dark field imaging
- Publication number 20060060780
- Publication date Mar 23, 2006
- Douglas K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam lithography
- Publication number 20030022077
- Publication date Jan 30, 2003
- Victor Katsap
- B82 - NANO-TECHNOLOGY

Person

Patents Grantslast 30 patents

Holey mirror arrangement for dual-energy e-beam inspector

Wien filter with reduced chromatic aberration

Apparatus and method for E-beam dark field imaging

Electron beam lithography apparatus focused through spherical aberr...

Magnetic energy filter

Electron beam lithography focusing through spherical aberration int...

Electron beam imaging apparatus

Electron beam inspection system and method

Electron beam inspection system and method

Patents Applicationslast 30 patents

Apparatus and method for e-beam dark field imaging

Electron beam lithography