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Eric N. Vella
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Mountain View, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Correcting aberration and apodization of an optical system using co...
Patent number
12,092,814
Issue date
Sep 17, 2024
KLA Corporation
Haifeng Huang
G02 - OPTICS
Information
Patent Grant
Apparatus and methods for measuring phase and amplitude of light th...
Patent number
11,131,629
Issue date
Sep 28, 2021
KLA-Tencor Corporation
Abdurrahman Sezginer
G01 - MEASURING TESTING
Information
Patent Grant
Techniques and systems for model-based critical dimension measurements
Patent number
9,875,534
Issue date
Jan 23, 2018
KLA-Tencor Corporation
Abdurrahman Sezginer
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus and methods for optically inspecting a sample for anomalies
Patent number
7,012,683
Issue date
Mar 14, 2006
KLA-Tencor Technologies Corporation
Ralph C. Wolf
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and methods for optically inspecting a sample for anomalies
Patent number
6,833,913
Issue date
Dec 21, 2004
KLA-Tencor Technologies Corporation
Ralph C. Wolf
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for scanning a beam of light across a specimen
Patent number
6,775,051
Issue date
Aug 10, 2004
KLA Tencor Technologies
Jamie Sullivan
G01 - MEASURING TESTING
Information
Patent Grant
Two-dimensional UV compatible programmable spatial filter
Patent number
6,686,995
Issue date
Feb 3, 2004
KLA-Tencor Technologies Corporation
Dieter E. Wilk
G01 - MEASURING TESTING
Information
Patent Grant
UV compatible programmable spatial filter
Patent number
6,686,994
Issue date
Feb 3, 2004
KLA-Tencor Technologies Corporation
Dieter Wilk
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
RECTANGULAR CUBOID, NON-POLARIZING BEAM SPLITTER THAT AVOIDS INTERF...
Publication number
20240280828
Publication date
Aug 22, 2024
KLA Corporation
Haifeng Huang
G02 - OPTICS
Information
Patent Application
CORRECTING ABERRATION AND APODIZATION OF AN OPTICAL SYSTEM USING CO...
Publication number
20220244530
Publication date
Aug 4, 2022
Haifeng Huang
G02 - OPTICS
Information
Patent Application
APPARATUS AND METHODS FOR MEASURING PHASE AND AMPLITUDE OF LIGHT TH...
Publication number
20180340886
Publication date
Nov 29, 2018
KLA-Tencor Corporation
Abdurrahman Sezginer
G01 - MEASURING TESTING
Information
Patent Application
TECHNIQUES AND SYSTEMS FOR MODEL-BASED CRITICAL DIMENSION MEASUREMENTS
Publication number
20170069080
Publication date
Mar 9, 2017
KLA-Tencor Corporation
Abdurrahman Sezginer
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Apparatus and methods for optically inspecting a sample for anomalies
Publication number
20050092899
Publication date
May 5, 2005
KLA-Tencor Technologies Corporation
Ralph C. Wolf
G01 - MEASURING TESTING
Information
Patent Application
TWO-DIMENSIONAL UV COMPATIBLE PROGRAMMABLE SPATIAL FILTER
Publication number
20040001198
Publication date
Jan 1, 2004
KLA-Tencor Technologies Corporation
Dieter E. Wilk
G02 - OPTICS
Information
Patent Application
UV compatible programmable spatial filter
Publication number
20030184739
Publication date
Oct 2, 2003
KLA-Tencor Technologies Corporation
Dieter E. Wilk
G02 - OPTICS
Information
Patent Application
Systems and methods for scanning a beam of light across a specimen
Publication number
20020181119
Publication date
Dec 5, 2002
Jamie Sullivan
G01 - MEASURING TESTING