Eric R. Harrington

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Ipswich, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic trap for particles entrained in an ion beam
- Patent number 6,534,775
- Issue date Mar 18, 2003
- Axcelis Technologies, Inc.
- Eric R. Harrington
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for removing particles entrained in an ion beam
- Patent number 6,525,326
- Issue date Feb 25, 2003
- Axcelis Technologies, Inc.
- Eric R. Harrington
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for removing contaminant particles relative to an...
- Patent number 6,476,399
- Issue date Nov 5, 2002
- Axcelis Technologies, Inc.
- Eric R. Harrington
- H01 - BASIC ELECTRIC ELEMENTS