Eric R. Johnson

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Los Gatos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for preforming measurement of a dimension of a test mark...
- Patent number 6,750,952
- Issue date Jun 15, 2004
- Nikon Precision, Inc.
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for dimension measurement of a pattern formed...
- Patent number 6,538,753
- Issue date Mar 25, 2003
- Nikon Precision, Inc.
- Ilya Grodnensky
- G01 - MEASURING TESTING
Information Patent Grant
Method for use of a critical dimensional test structure
- Patent number 6,449,031
- Issue date Sep 10, 2002
- Nikon Corporation
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming a critical dimension test structure and its use
- Patent number 6,094,256
- Issue date Jul 25, 2000
- Nikon Precision Inc.
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for preforming measurement of a dimension of a test mark...
- Publication number 20020180948
- Publication date Dec 5, 2002
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for dimension measurement of a pattern formed...
- Publication number 20020180990
- Publication date Dec 5, 2002
- Ilya Grodnensky
- G01 - MEASURING TESTING