Eric Russell Madsen

Person

Hillsboro, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Dual gas feed showerhead for deposition
- Patent number 11,535,936
- Issue date Dec 27, 2022
- Lam Research Corporation
- Michael Philip Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotary friction welded blank for PECVD heated showerhead
- Patent number 10,941,489
- Issue date Mar 9, 2021
- Lam Research Corporation
- Eric Madsen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Baffle plate and showerhead assemblies and corresponding manufactur...
- Patent number 10,483,092
- Issue date Nov 19, 2019
- Lam Research Corporation
- Eric Russell Madsen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Rotary friction welded blank for PECVD heated showerhead
- Patent number 10,266,947
- Issue date Apr 23, 2019
- Lam Research Corporation
- Eric Madsen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ball screw showerhead module adjuster assembly for showerhead modul...
- Patent number 9,290,843
- Issue date Mar 22, 2016
- Lam Research Corporation
- Eric Russell Madsen
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
Selected Reject Band Non-Radiofrequency-Coupling Tile and Associate...
- Publication number 20230262898
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Sunil KAPOOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUPING FEATURES OF SHOWERHEADS IN SUBSTRATE PROCESSING SYSTEMS
- Publication number 20230166371
- Publication date Jun 1, 2023
- LAM RESEARCH CORPORATION
- Rohit ODE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Dual Gas Feed Showerhead for Deposition
- Publication number 20230090368
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Michael Philip Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANAR MULTI-LAYER RADIO FREQUENCY FILTERS INCLUDING STACKED COILS...
- Publication number 20230071933
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Sunil KAPOOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PRECURSOR VAPORIZER
- Publication number 20230037208
- Publication date Feb 2, 2023
- LAM RESEARCH CORPORATION
- Eric Russell Madsen
- B22 - CASTING POWDER METALLURGY
Information Patent Application
SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS
- Publication number 20220415625
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Sunil KAPOOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER RING TO PEDESTAL KINEMATIC MOUNT FOR SUBSTRATE PROCESSING T...
- Publication number 20220415624
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Nick Ray LINEBARGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCED DIAMETER CARRIER RING HARDWARE FOR SUBSTRATE PROCESSING SYS...
- Publication number 20220235459
- Publication date Jul 28, 2022
- LAM RESEARCH CORPORATION
- Eric MADSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual Gas Feed Showerhead for Deposition
- Publication number 20200024739
- Publication date Jan 23, 2020
- LAM RESEARCH CORPORATION
- Michael Philip Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION SHOWER HEAD FOR UNIFORM GAS DISTRIBUTION
- Publication number 20190376184
- Publication date Dec 12, 2019
- LAM RESEARCH CORPORATION
- Michael John SELEP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTARY FRICTION WELDED BLANK FOR PECVD HEATED SHOWERHEAD
- Publication number 20190211451
- Publication date Jul 11, 2019
- LAM RESEARCH CORPORATION
- Eric Madsen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ROTARY FRICTION WELDED BLANK FOR PECVD HEATED SHOWERHEAD
- Publication number 20180057940
- Publication date Mar 1, 2018
- Lam Research Corporation
- Eric Madsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BAFFLE PLATE AND SHOWERHEAD ASSEMBLIES AND CORRESPONDING MANUFACTUR...
- Publication number 20170301515
- Publication date Oct 19, 2017
- LAM RESEARCH CORPORATION
- Eric Russell Madsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID 200 MM/300 MM SEMICONDUCTOR PROCESSING APPARATUSES
- Publication number 20160358808
- Publication date Dec 8, 2016
- LAM RESEARCH CORPORATION
- Eric Russell Madsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BALL SCREW SHOWERHEAD MODULE ADJUSTER ASSEMBLY FOR SHOWERHEAD MODUL...
- Publication number 20150225854
- Publication date Aug 13, 2015
- LAM RESEARCH CORPORATION
- Eric Russell Madsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Eric Russell Madsen

Person

Patents Grantslast 30 patents

Dual gas feed showerhead for deposition

Rotary friction welded blank for PECVD heated showerhead

Baffle plate and showerhead assemblies and corresponding manufactur...

Rotary friction welded blank for PECVD heated showerhead

Ball screw showerhead module adjuster assembly for showerhead modul...

Patents Applicationslast 30 patents

Selected Reject Band Non-Radiofrequency-Coupling Tile and Associate...

GROUPING FEATURES OF SHOWERHEADS IN SUBSTRATE PROCESSING SYSTEMS

Dual Gas Feed Showerhead for Deposition

PLANAR MULTI-LAYER RADIO FREQUENCY FILTERS INCLUDING STACKED COILS...

LIQUID PRECURSOR VAPORIZER

SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS

CARRIER RING TO PEDESTAL KINEMATIC MOUNT FOR SUBSTRATE PROCESSING T...

REDUCED DIAMETER CARRIER RING HARDWARE FOR SUBSTRATE PROCESSING SYS...

Dual Gas Feed Showerhead for Deposition

CHEMICAL VAPOR DEPOSITION SHOWER HEAD FOR UNIFORM GAS DISTRIBUTION

ROTARY FRICTION WELDED BLANK FOR PECVD HEATED SHOWERHEAD

ROTARY FRICTION WELDED BLANK FOR PECVD HEATED SHOWERHEAD

BAFFLE PLATE AND SHOWERHEAD ASSEMBLIES AND CORRESPONDING MANUFACTUR...

HYBRID 200 MM/300 MM SEMICONDUCTOR PROCESSING APPARATUSES

BALL SCREW SHOWERHEAD MODULE ADJUSTER ASSEMBLY FOR SHOWERHEAD MODUL...