Eric Samulon

Person

Oakland, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Model-based control of substrate processing systems
- Patent number 10,741,429
- Issue date Aug 11, 2020
- Lam Research Corporation
- Tao Zhang
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIG...
- Publication number 20240404798
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANODIZATION FOR METAL MATRIX COMPOSITE SEMICONDUCTOR PROCESSING CHA...
- Publication number 20230343627
- Publication date Oct 26, 2023
- LAM RESEARCH CORPORATION
- Debanjan DAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE
- Publication number 20230253193
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- Jeremy George SMITH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS
- Publication number 20230087913
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Feng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT WITH PROTECTIVE SURFACE FOR PROCESSING CHAMBER
- Publication number 20230081544
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Pylin SAROBOL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH...
- Publication number 20230039670
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Eric SAMULON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIG...
- Publication number 20220223387
- Publication date Jul 14, 2022
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODEL-BASED CONTROL OF SUBSTRATE PROCESSING SYSTEMS
- Publication number 20190393059
- Publication date Dec 26, 2019
- LAM RESEARCH CORPORATION
- Tao Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Eric Samulon

Person

Patents Grantslast 30 patents

Model-based control of substrate processing systems

Patents Applicationslast 30 patents

HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIG...

ANODIZATION FOR METAL MATRIX COMPOSITE SEMICONDUCTOR PROCESSING CHA...

SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE

COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS

COMPONENT WITH PROTECTIVE SURFACE FOR PROCESSING CHAMBER

MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH...

HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIG...

MODEL-BASED CONTROL OF SUBSTRATE PROCESSING SYSTEMS