Eric Shero

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming chromium nitride layer and structure including th...
- Patent number 12,087,586
- Issue date Sep 10, 2024
- ASM IP Holding B.V.
- Qi Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom-up metal nitride formation
- Patent number 12,068,164
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a transition metal nitride film on a substra...
- Patent number 11,976,361
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for treatment of deposition reactor
- Patent number 11,967,488
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Suvi Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source precursor vessel
- Patent number 11,959,168
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Jianqiu Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing device
- Patent number 11,946,136
- Issue date Apr 2, 2024
- ASM IP Holding B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,926,894
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structures including metal carbide material, devices including the...
- Patent number 11,926,895
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selective deposition of silicon nitride layer and struct...
- Patent number 11,901,175
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a polycrystalline molybdenum film over a surfac...
- Patent number 11,898,242
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming vanadium nitride layer and structure including th...
- Patent number 11,885,013
- Issue date Jan 30, 2024
- ASM IP Holding B.V.
- Giuseppe Alessio Verni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing vanadium metal
- Patent number 11,873,557
- Issue date Jan 16, 2024
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor deposition reactor manifolds
- Patent number 11,830,731
- Issue date Nov 28, 2023
- ASM IP Holding B.V.
- Dinkar Nandwana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of hafnium oxide within a high aspect ratio hole
- Patent number 11,791,153
- Issue date Oct 17, 2023
- ASM IP Holding B.V.
- Jiyeon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid source sublimator
- Patent number 11,773,486
- Issue date Oct 3, 2023
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone reactor, system including the reactor, and method of usi...
- Patent number 11,742,189
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Carl Louis White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure including SiOCN layer and method of forming same
- Patent number 11,742,198
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source sublimator
- Patent number 11,634,812
- Issue date Apr 25, 2023
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating zone separation for reactant evaporation system
- Patent number 11,624,113
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming structures including a vanadium or indium layer
- Patent number 11,521,851
- Issue date Dec 6, 2022
- ASM IP Holding B.V.
- Eric James Shero
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor reaction chamber showerhead
- Patent number 11,501,956
- Issue date Nov 15, 2022
- ASM IP Holding B.V.
- Carl White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor manifolds
- Patent number 11,492,701
- Issue date Nov 8, 2022
- ASM IP Holding B.V.
- Dinkar Nandwana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selective deposition of silicon nitride layer and struct...
- Patent number 11,424,119
- Issue date Aug 23, 2022
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate susceptor using edge purging
- Patent number 11,404,302
- Issue date Aug 2, 2022
- ASM IP Holding B.V.
- Raj Singu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,377,732
- Issue date Jul 5, 2022
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a transition metal nitride film on a substra...
- Patent number 11,306,395
- Issue date Apr 19, 2022
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structures including metal carbide material, devices including the...
- Patent number 11,242,598
- Issue date Feb 8, 2022
- ASM IP Holding B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor flow control apparatus for atomic layer deposition
- Patent number 11,208,722
- Issue date Dec 28, 2021
- ASM IP Holding B.V.
- Carl L. White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium aluminum and tantalum aluminum thin films
- Patent number 11,139,383
- Issue date Oct 5, 2021
- ASM IP Holding B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure including SiOC layer and method of forming same
- Patent number 11,114,294
- Issue date Sep 7, 2021
- ASM IP Holding B.V.
- Bed Prasad Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
REMOTE SOLID REFILL CHAMBER
- Publication number 20240401192
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL
- Publication number 20240401194
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Shuaidi Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING CHROMIUM NITRIDE LAYER AND STRUCTURE INCLUDING TH...
- Publication number 20240395555
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Qi Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOTTOM-UP METAL NITRIDE FORMATION
- Publication number 20240379368
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE WITH EDGE PURGING
- Publication number 20240254629
- Publication date Aug 1, 2024
- ASM IP HOLDING B.V.
- Ankit Kimtee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD V...
- Publication number 20240234129
- Publication date Jul 11, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAYER DEPOSITION WITH POST-DEPOSITION AGGLOMERATION MITIGATION
- Publication number 20240229233
- Publication date Jul 11, 2024
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE SOLID REFILL CHAMBER
- Publication number 20240218506
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS
- Publication number 20240209501
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID PRECURSOR WEIGHT MONITORING SYSTEM, REACTOR SYSTEM, AND METHO...
- Publication number 20240209505
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- William Petro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE
- Publication number 20240200189
- Publication date Jun 20, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SOLID SOURCE REFILL
- Publication number 20240191352
- Publication date Jun 13, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CLEANING A VESSEL
- Publication number 20240165681
- Publication date May 23, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- B08 - CLEANING
Information Patent Application
SEMICONDUCTING OXIDE CHANNEL FOR 3D NAND AND METHOD OF MAKING
- Publication number 20240153767
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- Bart Vermeulen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
- Publication number 20240141486
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTANT DELIVERY SYSTEM AND REACTOR SYSTEM INCLUDING SAME
- Publication number 20240133033
- Publication date Apr 25, 2024
- ASM IP HOLDING B.V.
- Jacqueline Wrench
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSI...
- Publication number 20240093363
- Publication date Mar 21, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEMS FOR FORMING DEVICE STRUCTURES INCLUDING HIGH-K D...
- Publication number 20240072104
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING MONITORING PROCESS
- Publication number 20240035164
- Publication date Feb 1, 2024
- ASM IP HOLDING, B.V.
- Jan Deckers
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR TREATMENT OF DEPOSITION REACTOR
- Publication number 20240014012
- Publication date Jan 11, 2024
- ASM IP HOLDING B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLID SOURCE SUBLIMATOR
- Publication number 20230383402
- Publication date Nov 30, 2023
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
- Publication number 20230369040
- Publication date Nov 16, 2023
- ASM IP HOLDING B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE FLOWABLE VANADIUM OXIDE GAP FILL
- Publication number 20230357924
- Publication date Nov 9, 2023
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE SUBLIMATOR
- Publication number 20230313370
- Publication date Oct 5, 2023
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITION OF MOLYBDENUM FOR SOURCE/DRAIN C...
- Publication number 20230298902
- Publication date Sep 21, 2023
- ASM IP HOLDING B.V.
- Jiyeon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING ZONE SEPARATION FOR REACTANT EVAPORATION SYSTEM
- Publication number 20230235454
- Publication date Jul 27, 2023
- ASM IP HOLDING B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR SYSTEM WITH SOURCE VESSEL WEIGHT MONITORING
- Publication number 20230234014
- Publication date Jul 27, 2023
- ASM IP HOLDING B.V.
- Venkata Motupalli
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR TREATMENT OF DEPOSITION REACTOR
- Publication number 20230230813
- Publication date Jul 20, 2023
- ASM IP HOLDING B.V.
- Suvi Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE WITH WAFER EDGE PURGING
- Publication number 20230207377
- Publication date Jun 29, 2023
- ASM IP HOLDING B.V.
- Rohan Vijay Rane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF GATE STACKS COMPRISING A THRESHOLD VOLTAGE TUNING LAYER
- Publication number 20230197796
- Publication date Jun 22, 2023
- ASM IP HOLDING B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Method of forming chromium nitride layer and structure including th...

Bottom-up metal nitride formation

Methods for depositing a transition metal nitride film on a substra...

Method for treatment of deposition reactor

Solid source precursor vessel

Semiconductor processing device

Reactant vaporizer and related systems and methods

Structures including metal carbide material, devices including the...

Method for selective deposition of silicon nitride layer and struct...

Methods for forming a polycrystalline molybdenum film over a surfac...

Method of forming vanadium nitride layer and structure including th...

Method of depositing vanadium metal

Semiconductor deposition reactor manifolds

Deposition of hafnium oxide within a high aspect ratio hole

Solid source sublimator

Multi-zone reactor, system including the reactor, and method of usi...

Structure including SiOCN layer and method of forming same

Solid source sublimator

Heating zone separation for reactant evaporation system

Method of forming structures including a vanadium or indium layer

Semiconductor reaction chamber showerhead

Reactor manifolds

Method for selective deposition of silicon nitride layer and struct...

Substrate susceptor using edge purging

Reactant vaporizer and related systems and methods

Methods for depositing a transition metal nitride film on a substra...

Structures including metal carbide material, devices including the...

Vapor flow control apparatus for atomic layer deposition

Titanium aluminum and tantalum aluminum thin films

Structure including SiOC layer and method of forming same

Patents Applicationslast 30 patents

REMOTE SOLID REFILL CHAMBER

METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL

METHOD OF FORMING CHROMIUM NITRIDE LAYER AND STRUCTURE INCLUDING TH...

BOTTOM-UP METAL NITRIDE FORMATION

SEMICONDUCTOR PROCESSING DEVICE WITH EDGE PURGING

METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD V...

LAYER DEPOSITION WITH POST-DEPOSITION AGGLOMERATION MITIGATION

REMOTE SOLID REFILL CHAMBER

REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS

SOLID PRECURSOR WEIGHT MONITORING SYSTEM, REACTOR SYSTEM, AND METHO...

SEMICONDUCTOR PROCESSING DEVICE

METHODS AND APPARATUS FOR SOLID SOURCE REFILL

METHODS AND APPARATUS FOR CLEANING A VESSEL

SEMICONDUCTING OXIDE CHANNEL FOR 3D NAND AND METHOD OF MAKING

APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...

REACTANT DELIVERY SYSTEM AND REACTOR SYSTEM INCLUDING SAME

METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSI...

METHOD AND SYSTEMS FOR FORMING DEVICE STRUCTURES INCLUDING HIGH-K D...

SEMICONDUCTOR MANUFACTURING MONITORING PROCESS

METHOD FOR TREATMENT OF DEPOSITION REACTOR

SOLID SOURCE SUBLIMATOR

STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME

LOW TEMPERATURE FLOWABLE VANADIUM OXIDE GAP FILL

SOLID SOURCE SUBLIMATOR

SYSTEMS AND METHODS FOR DEPOSITION OF MOLYBDENUM FOR SOURCE/DRAIN C...

HEATING ZONE SEPARATION FOR REACTANT EVAPORATION SYSTEM

REACTOR SYSTEM WITH SOURCE VESSEL WEIGHT MONITORING

METHOD FOR TREATMENT OF DEPOSITION REACTOR

SEMICONDUCTOR PROCESSING DEVICE WITH WAFER EDGE PURGING

FORMATION OF GATE STACKS COMPRISING A THRESHOLD VOLTAGE TUNING LAYER