Eric Shero

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for forming a layer comprising aluminum, titani...
- Patent number 12,362,171
- Issue date Jul 15, 2025
- ASM IP Holding B.V.
- Lifu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for delivery of vanadium compounds
- Patent number 12,351,902
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition of films comprising molybdenum
- Patent number 12,354,877
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of gate stacks comprising a threshold voltage tuning layer
- Patent number 12,295,163
- Issue date May 6, 2025
- ASM IP Holding B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure including SiOCN layer and method of forming same
- Patent number 12,293,911
- Issue date May 6, 2025
- ASM IP Holding B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detection method for seized traveling lift pins in wafer processing...
- Patent number 12,249,534
- Issue date Mar 11, 2025
- ASM IP Holding B.V.
- Eric Shero
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater assembly including cooling apparatus and method of using same
- Patent number 12,247,286
- Issue date Mar 11, 2025
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium aluminum and tantalum aluminum thin films
- Patent number 12,237,392
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming vanadium nitride layer and structure including th...
- Patent number 12,237,171
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Giuseppe Alessio Verni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for stabilizing vanadium compounds
- Patent number 12,221,357
- Issue date Feb 11, 2025
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming chromium nitride layer and structure including th...
- Patent number 12,087,586
- Issue date Sep 10, 2024
- ASM IP Holding B.V.
- Qi Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom-up metal nitride formation
- Patent number 12,068,164
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a transition metal nitride film on a substra...
- Patent number 11,976,361
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for treatment of deposition reactor
- Patent number 11,967,488
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Suvi Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source precursor vessel
- Patent number 11,959,168
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Jianqiu Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing device
- Patent number 11,946,136
- Issue date Apr 2, 2024
- ASM IP Holding B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,926,894
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structures including metal carbide material, devices including the...
- Patent number 11,926,895
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selective deposition of silicon nitride layer and struct...
- Patent number 11,901,175
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a polycrystalline molybdenum film over a surfac...
- Patent number 11,898,242
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming vanadium nitride layer and structure including th...
- Patent number 11,885,013
- Issue date Jan 30, 2024
- ASM IP Holding B.V.
- Giuseppe Alessio Verni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing vanadium metal
- Patent number 11,873,557
- Issue date Jan 16, 2024
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor deposition reactor manifolds
- Patent number 11,830,731
- Issue date Nov 28, 2023
- ASM IP Holding B.V.
- Dinkar Nandwana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of hafnium oxide within a high aspect ratio hole
- Patent number 11,791,153
- Issue date Oct 17, 2023
- ASM IP Holding B.V.
- Jiyeon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid source sublimator
- Patent number 11,773,486
- Issue date Oct 3, 2023
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone reactor, system including the reactor, and method of usi...
- Patent number 11,742,189
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Carl Louis White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure including SiOCN layer and method of forming same
- Patent number 11,742,198
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid source sublimator
- Patent number 11,634,812
- Issue date Apr 25, 2023
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating zone separation for reactant evaporation system
- Patent number 11,624,113
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming structures including a vanadium or indium layer
- Patent number 11,521,851
- Issue date Dec 6, 2022
- ASM IP Holding B.V.
- Eric James Shero
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
- Publication number 20250239444
- Publication date Jul 24, 2025
- ASM IP HOLDING B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIFT ASSEMBLY, SYSTEM INCLUDING THE ASSEMBLY, AND METHODS...
- Publication number 20250233007
- Publication date Jul 17, 2025
- ASM IP HOLDING B.V.
- Tilakraj Durgadahalli Shankaregowda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR FORMING A THRESHOLD VOLTAGE SHIFTI...
- Publication number 20250218783
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Giuseppe Alessio Verni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
- Publication number 20250176248
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER ASSEMBLY INCLUDING COOLING APPARATUS AND METHOD OF USING SAME
- Publication number 20250171898
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS RECYCLING
- Publication number 20250171900
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLYMERIC INHIBITOR FOR AREA SELECTIVE DEPOSITION
- Publication number 20250137118
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF INHIBITOR MATERIAL AND DEPOSITION ASSEMBLIES
- Publication number 20250109491
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL AND CARBON CONTAINING LAYERS, INCLUDING METHODS AND SYSTEMS F...
- Publication number 20250105012
- Publication date Mar 27, 2025
- ASM IP HOLDING B.V.
- Charles Dezelah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF ORGANIC POLYMER MATERIAL AND DEPOSITION ASS...
- Publication number 20250092509
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Bhagyesh Purohit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR TREATING SUBSTRATE SURFACE
- Publication number 20250043422
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS
- Publication number 20250033990
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Charles Dezelah
- C01 - INORGANIC CHEMISTRY
Information Patent Application
REMOTE SOLID REFILL CHAMBER
- Publication number 20240401192
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL
- Publication number 20240401194
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Shuaidi Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING CHROMIUM NITRIDE LAYER AND STRUCTURE INCLUDING TH...
- Publication number 20240395555
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Qi Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOTTOM-UP METAL NITRIDE FORMATION
- Publication number 20240379368
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE WITH EDGE PURGING
- Publication number 20240254629
- Publication date Aug 1, 2024
- ASM IP HOLDING B.V.
- Ankit Kimtee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD V...
- Publication number 20240234129
- Publication date Jul 11, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAYER DEPOSITION WITH POST-DEPOSITION AGGLOMERATION MITIGATION
- Publication number 20240229233
- Publication date Jul 11, 2024
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE SOLID REFILL CHAMBER
- Publication number 20240218506
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS
- Publication number 20240209501
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID PRECURSOR WEIGHT MONITORING SYSTEM, REACTOR SYSTEM, AND METHO...
- Publication number 20240209505
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- William Petro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE
- Publication number 20240200189
- Publication date Jun 20, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SOLID SOURCE REFILL
- Publication number 20240191352
- Publication date Jun 13, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CLEANING A VESSEL
- Publication number 20240165681
- Publication date May 23, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- B08 - CLEANING
Information Patent Application
SEMICONDUCTING OXIDE CHANNEL FOR 3D NAND AND METHOD OF MAKING
- Publication number 20240153767
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- Bart Vermeulen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
- Publication number 20240141486
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTANT DELIVERY SYSTEM AND REACTOR SYSTEM INCLUDING SAME
- Publication number 20240133033
- Publication date Apr 25, 2024
- ASM IP HOLDING B.V.
- Jacqueline Wrench
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSI...
- Publication number 20240093363
- Publication date Mar 21, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEMS FOR FORMING DEVICE STRUCTURES INCLUDING HIGH-K D...
- Publication number 20240072104
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Methods and systems for forming a layer comprising aluminum, titani...

Methods and systems for delivery of vanadium compounds

Vapor deposition of films comprising molybdenum

Formation of gate stacks comprising a threshold voltage tuning layer

Structure including SiOCN layer and method of forming same

Detection method for seized traveling lift pins in wafer processing...

Heater assembly including cooling apparatus and method of using same

Titanium aluminum and tantalum aluminum thin films

Method of forming vanadium nitride layer and structure including th...

Methods and apparatus for stabilizing vanadium compounds

Method of forming chromium nitride layer and structure including th...

Bottom-up metal nitride formation

Methods for depositing a transition metal nitride film on a substra...

Method for treatment of deposition reactor

Solid source precursor vessel

Semiconductor processing device

Reactant vaporizer and related systems and methods

Structures including metal carbide material, devices including the...

Method for selective deposition of silicon nitride layer and struct...

Methods for forming a polycrystalline molybdenum film over a surfac...

Method of forming vanadium nitride layer and structure including th...

Method of depositing vanadium metal

Semiconductor deposition reactor manifolds

Deposition of hafnium oxide within a high aspect ratio hole

Solid source sublimator

Multi-zone reactor, system including the reactor, and method of usi...

Structure including SiOCN layer and method of forming same

Solid source sublimator

Heating zone separation for reactant evaporation system

Method of forming structures including a vanadium or indium layer

Patents Applicationslast 30 patents

STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME

SUBSTRATE LIFT ASSEMBLY, SYSTEM INCLUDING THE ASSEMBLY, AND METHODS...

METHOD, SYSTEM AND APPARATUS FOR FORMING A THRESHOLD VOLTAGE SHIFTI...

TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

HEATER ASSEMBLY INCLUDING COOLING APPARATUS AND METHOD OF USING SAME

PROCESS GAS RECYCLING

POLYMERIC INHIBITOR FOR AREA SELECTIVE DEPOSITION

SELECTIVE DEPOSITION OF INHIBITOR MATERIAL AND DEPOSITION ASSEMBLIES

METAL AND CARBON CONTAINING LAYERS, INCLUDING METHODS AND SYSTEMS F...

SELECTIVE DEPOSITION OF ORGANIC POLYMER MATERIAL AND DEPOSITION ASS...

METHOD, SYSTEM AND APPARATUS FOR TREATING SUBSTRATE SURFACE

METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS

REMOTE SOLID REFILL CHAMBER

METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL

METHOD OF FORMING CHROMIUM NITRIDE LAYER AND STRUCTURE INCLUDING TH...

BOTTOM-UP METAL NITRIDE FORMATION

SEMICONDUCTOR PROCESSING DEVICE WITH EDGE PURGING

METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD V...

LAYER DEPOSITION WITH POST-DEPOSITION AGGLOMERATION MITIGATION

REMOTE SOLID REFILL CHAMBER

REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS

SOLID PRECURSOR WEIGHT MONITORING SYSTEM, REACTOR SYSTEM, AND METHO...

SEMICONDUCTOR PROCESSING DEVICE

METHODS AND APPARATUS FOR SOLID SOURCE REFILL

METHODS AND APPARATUS FOR CLEANING A VESSEL

SEMICONDUCTING OXIDE CHANNEL FOR 3D NAND AND METHOD OF MAKING

APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...

REACTANT DELIVERY SYSTEM AND REACTOR SYSTEM INCLUDING SAME

METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSI...

METHOD AND SYSTEMS FOR FORMING DEVICE STRUCTURES INCLUDING HIGH-K D...