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Eric W. Deguns

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  • Somerville, MA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    ALD systems and methods
    • Patent number 9,777,371
    • Issue date Oct 3, 2017
    • Ultratech, Inc.
    • Roger R. Coutu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    ALD SYSTEMS AND METHODS
    • Publication number 20120064245
    • Publication date Mar 15, 2012
    • Cambridge NanoTech Inc.
    • Roger R. Coutu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR PRECURSOR DELIVERY
    • Publication number 20110311726
    • Publication date Dec 22, 2011
    • Cambridge NanoTech Inc.
    • Guo Liu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...