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Eric W.G. Hoglund
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Algonquin, IL, US
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing composition for metal CMP
Patent number
6,767,476
Issue date
Jul 27, 2004
Cabot Microelectronics Corporation
Shumin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Polishing composition for metal CMP
Patent number
6,592,776
Issue date
Jul 15, 2003
Cabot Microelectronics Corporation
Shumin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Polishing composition including an inhibitor of tungsten etching
Patent number
6,136,711
Issue date
Oct 24, 2000
Cabot Corporation
Steven K. Grumbine
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Polishing composition including an inhibitor of tungsten etching
Patent number
6,083,419
Issue date
Jul 4, 2000
Cabot Corporation
Steven K. Grumbine
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Polishing composition for metal CMP
Publication number
20030203635
Publication date
Oct 30, 2003
Cabot Microelectronics Corporation
Shumin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...