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Erica Porras
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Los Gatos, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for monitoring and control of suck back level...
Patent number
7,935,948
Issue date
May 3, 2011
Sokudo Co., Ltd.
Erica R. Porras
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for determining object height
Patent number
7,567,885
Issue date
Jul 28, 2009
Sokudo Co., Ltd.
Harald Herchen
G01 - MEASURING TESTING
Information
Patent Grant
Method and system to measure flow velocity and volume
Patent number
7,517,469
Issue date
Apr 14, 2009
Sokudo Co., Ltd.
Harald Herchen
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for detection of wafer centering in a track litho...
Patent number
7,497,026
Issue date
Mar 3, 2009
Sokudo Co., Ltd.
Harald Herchen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR SUPPORTING A SUBSTRATE DURING SEMICONDUCTOR PROCESSIN...
Publication number
20090179366
Publication date
Jul 16, 2009
Sokudo Co., Ltd.
Harald Herchen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Determining Object Height
Publication number
20090055124
Publication date
Feb 26, 2009
SOKUDO CO., LTD.
Harald Herchen
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND SYSTEM FOR DETECTION OF WAFER CENTERING IN A TRACK LITHO...
Publication number
20080168673
Publication date
Jul 17, 2008
SOKUDO CO., LTD.
Harald Herchen
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND SYSTEM FOR BAKE PLATE HEAT TRANSFER CONTROL IN TRACK LIT...
Publication number
20080160462
Publication date
Jul 3, 2008
SOKUDO CO., LTD.
Harald Herchen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM TO MEASURE AND COMPENSATE FOR SUBSTRATE WARPAGE D...
Publication number
20080153182
Publication date
Jun 26, 2008
SOKUDO CO., LTD.
Harald Herchen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR MONITORING AND CONTROL OF SUCK BACK LEVEL...
Publication number
20080035666
Publication date
Feb 14, 2008
SOKUDO CO., LTD.
Erica R. Porras
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System to Measure Flow Velocity and Volume
Publication number
20070251921
Publication date
Nov 1, 2007
Applied Materials, Inc.
Harald HERCHEN
G01 - MEASURING TESTING