Erich Schubert

Person

Ellwangen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 10,191,382
- Issue date Jan 29, 2019
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 9,977,333
- Issue date May 22, 2018
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 9,599,904
- Issue date Mar 21, 2017
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 9,310,694
- Issue date Apr 12, 2016
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 8,467,031
- Issue date Jun 18, 2013
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system particularly for microlithography
- Patent number 7,405,809
- Issue date Jul 29, 2008
- Carl Zeiss SMT AG
- Joachim Hainz
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Collector with fastening devices for fastening mirror shells
- Patent number 7,321,126
- Issue date Jan 22, 2008
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Collector with fastening devices for fastening mirror shells
- Patent number 7,091,505
- Issue date Aug 15, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20180335702
- Publication date Nov 22, 2018
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20170351183
- Publication date Dec 7, 2017
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20160187789
- Publication date Jun 30, 2016
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20130250264
- Publication date Sep 26, 2013
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL UNIT HAVING ADJUSTABLE FORCE ACTION ON AN OPTICAL MODULE
- Publication number 20110019171
- Publication date Jan 27, 2011
- Carl Zeiss SMT AG
- Erich Schubert
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20100265482
- Publication date Oct 21, 2010
- Carl Zeiss SMT AG
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DOUBLE-FACETTED ILLUMINATION SYSTEM WITH ATTENUATOR ELEMENTS ON THE...
- Publication number 20080165925
- Publication date Jul 10, 2008
- Carl Zeiss SMT AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Collector with fastening devices for fastening mirror shells
- Publication number 20080042079
- Publication date Feb 21, 2008
- Carl Zeiss SMT
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Collector with fastening devices for fastening mirror shells
- Publication number 20060291062
- Publication date Dec 28, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Illumination system particularly for microlithography
- Publication number 20060208206
- Publication date Sep 21, 2006
- Joachim Hainz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Collector with fastening devices for fastening mirror shells
- Publication number 20040227103
- Publication date Nov 18, 2004
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS

Erich Schubert

Person

Patents Grantslast 30 patents

Illumination system for illuminating a mask in a microlithographic...

Illumination system for illuminating a mask in a microlithographic...

Illumination system for illuminating a mask in a microlithographic...

Illumination system for illuminating a mask in a microlithographic...

Illumination system for illuminating a mask in a microlithographic...

Illumination system particularly for microlithography

Collector with fastening devices for fastening mirror shells

Collector with fastening devices for fastening mirror shells

Patents Applicationslast 30 patents

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

OPTICAL UNIT HAVING ADJUSTABLE FORCE ACTION ON AN OPTICAL MODULE

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

DOUBLE-FACETTED ILLUMINATION SYSTEM WITH ATTENUATOR ELEMENTS ON THE...

Collector with fastening devices for fastening mirror shells

Collector with fastening devices for fastening mirror shells

Illumination system particularly for microlithography

Collector with fastening devices for fastening mirror shells