Erik A. Mitchell

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Quincy, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Wafer platen equipped with electrostatic clamp, wafer backside gas...
- Patent number 7,126,808
- Issue date Oct 24, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Wafer platen equipped with electrostatic clamp, wafer backside gas...
- Publication number 20040196616
- Publication date Oct 7, 2004
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS