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Erik Hjertaas
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last 30 patents
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Patent Application
WAFER STACK CLEANING
Publication number
20110168212
Publication date
Jul 14, 2011
REC ScanWafer AS
Per Arne Wang
B28 - WORKING CEMENT, CLAY, OR STONE
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Patent Application
Method and device for separating silicon wafers
Publication number
20080146003
Publication date
Jun 19, 2008
REC ScanWafer AS
Per Arne Wang
B28 - WORKING CEMENT, CLAY, OR STONE