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Erik Johan KOOP
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method of measuring a parameter of a lithographic process, metrolog...
Patent number
11,099,489
Issue date
Aug 24, 2021
ASML Netherlands B.V.
Hugo Augustinus Joseph Cramer
G01 - MEASURING TESTING
Information
Patent Grant
Methods for controlling lithographic apparatus, lithographic appara...
Patent number
10,558,130
Issue date
Feb 11, 2020
ASNL Netherlands B.V.
Rene Marinus Gerardus Johan Queens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring a property of a substrate, inspection apparatus...
Patent number
10,474,043
Issue date
Nov 12, 2019
ASML Netherlands B.V.
Patrick Warnaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods for controlling lithographic apparatus, lithographic appara...
Patent number
10,274,849
Issue date
Apr 30, 2019
ASML Netherlands B.V.
Rene Marinus Gerardus Johan Queens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Level sensor, a method for determining a height map of a substrate...
Patent number
9,488,465
Issue date
Nov 8, 2016
ASML Netherlands B.V.
Laurent Khuat Duy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining exposure settings, lithographic exposure app...
Patent number
8,208,118
Issue date
Jun 26, 2012
ASML Netherlands B.V.
David Warren Burry
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method of Measuring a Parameter of a Lithographic Process, Metrolog...
Publication number
20200192231
Publication date
Jun 18, 2020
ASML NETHERLANDS B.V.
Hugo Augustinus Joseph CRAMER
G01 - MEASURING TESTING
Information
Patent Application
A METHOD OF DETERMINING A HEIGHT PROFILE, A MEASUREMENT SYSTEM AND...
Publication number
20190294060
Publication date
Sep 26, 2019
ASML Nethertands B.V.
Arend Johannes DONKERBROEK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR CONTROLLING LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARA...
Publication number
20190212664
Publication date
Jul 11, 2019
ASML NETHERLANDS B.V.
Rene Marinus Gerardus Johan QUEENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR CONTROLLING LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARA...
Publication number
20180210351
Publication date
Jul 26, 2018
ASML NETHERLANDS B.V.
Rene Marinus Gerardus Johan QUEENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Measuring a Property of a Substrate, Inspection Apparatus...
Publication number
20180173105
Publication date
Jun 21, 2018
ASML NETHERLANDS B.V.
Patrick Warnaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Level Sensor, a Method for Determining a Height Map of a Substrate,...
Publication number
20130128247
Publication date
May 23, 2013
ASML NETHERLANDS B.V.
Laurent KHUAT DUY
G01 - MEASURING TESTING
Information
Patent Application
Method for Determining Exposure Settings, Lithographic Exposure App...
Publication number
20090201473
Publication date
Aug 13, 2009
ASML NETHERLANDS B.V.
David Warren BURRY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY