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Erik Johannes Maria WALLERBOS
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Helmond, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Methods of determining corrections for a patterning process, device...
Patent number
11,782,349
Issue date
Oct 10, 2023
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining corrections for a patterning process, device...
Patent number
11,592,753
Issue date
Feb 28, 2023
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for optimization of a lithographic process
Patent number
11,480,884
Issue date
Oct 25, 2022
ASML Netherlands B.V.
Everhardus Cornelis Mos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optimizing a sequence of processes for manufacturing of product units
Patent number
11,442,367
Issue date
Sep 13, 2022
ASML Netherlands B.V.
Jochem Sebastiaan Wildenberg
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for determining contribution to a fingerprint
Patent number
11,378,891
Issue date
Jul 5, 2022
ASML Netherlands B.V.
Davit Harutyunyan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of determining corrections for a patterning process, device...
Patent number
11,327,407
Issue date
May 10, 2022
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for inspection and metrology
Patent number
11,170,072
Issue date
Nov 9, 2021
ASML Netherands B.V.
Everhardus Cornelis Mos
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Optimizing a sequence of processes for manufacturing of product units
Patent number
11,106,141
Issue date
Aug 31, 2021
ASML Netherlands B.V.
Jochem Sebastiaan Wildenberg
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for characterizing distortions in a lithographic process, li...
Patent number
10,928,737
Issue date
Feb 23, 2021
ASML Netherlands B.V.
Everhardus Cornelis Mos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining corrections for a patterning process
Patent number
10,877,381
Issue date
Dec 29, 2020
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining contribution to a fingerprint
Patent number
10,816,904
Issue date
Oct 27, 2020
ASML Netherlands B.V.
Davit Harutyunyan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of monitoring and device manufacturing method
Patent number
10,809,631
Issue date
Oct 20, 2020
ASML Netherlands B.V.
Everhardus Cornelis Mos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for optimization of a lithographic process
Patent number
10,802,408
Issue date
Oct 13, 2020
ASML Netherlands B.V.
Everhardus Cornelis Mos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
Publication number
20220229373
Publication date
Jul 21, 2022
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
Publication number
20220027437
Publication date
Jan 27, 2022
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPTIMIZING A SEQUENCE OF PROCESSES FOR MANUFACTURING OF PRODUCT UNITS
Publication number
20210389684
Publication date
Dec 16, 2021
ASML NETHERLANDS B.V.
Jochem Sebastiaan Wildenberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
Publication number
20210080836
Publication date
Mar 18, 2021
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT
Publication number
20210003927
Publication date
Jan 7, 2021
ASML NETHERLANDS B.V.
Davit Harutyunyan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR OPTIMIZATION OF A LITHOGRAPHIC PROCESS
Publication number
20200356012
Publication date
Nov 12, 2020
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTIMIZING A SEQUENCE OF PROCESSES FOR MANUFACTURING OF PRODUCT UNITS
Publication number
20200026200
Publication date
Jan 23, 2020
ASML NETHERLANDS B.V.
Jochem Sebastiaan WILDENBERG
G05 - CONTROLLING REGULATING
Information
Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
Publication number
20200019067
Publication date
Jan 16, 2020
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A METHOD FOR OPTIMIZATION OF A LITHOGRAPHIC PROCESS
Publication number
20190317412
Publication date
Oct 17, 2019
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT
Publication number
20190271919
Publication date
Sep 5, 2019
ASML NETHERLANDS B.V.
Davit HARUTYUNYAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CHARACTERIZING DISTORTIONS IN A LITHOGRAPHIC PROCESS, LI...
Publication number
20190011842
Publication date
Jan 10, 2019
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MONITORING AND DEVICE MANUFACTURING METHOD
Publication number
20180307145
Publication date
Oct 25, 2018
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
Publication number
20180067900
Publication date
Mar 8, 2018
ASML NETHERLANDS B.V.
Everhardus Cornelis MOS
G06 - COMPUTING CALCULATING COUNTING