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Erik Johnson
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for inspecting reticles implementing parallel...
Patent number
7,724,939
Issue date
May 25, 2010
KLA Tencor
Edward M. Goldberg
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Defect detection using multiple sensors and parallel processing
Patent number
7,221,992
Issue date
May 22, 2007
KLA-Tencor Technologies Corporation
James A. Smith
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for inspecting reticles implementing parallel...
Patent number
7,106,895
Issue date
Sep 12, 2006
KLA Tencor
Edward M. Goldberg
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Defect detection using multiple sensors and parallel processing
Patent number
6,990,385
Issue date
Jan 24, 2006
KLA-Tencor Technologies Corporation
James A. Smith
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR INSPECTING RETICLES IMPLEMENTING PARALLEL...
Publication number
20060269119
Publication date
Nov 30, 2006
KLA-TENCOR
EDWARD M. GOLDBERG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Defect detection using multiple sensors and parallel processing
Publication number
20060069460
Publication date
Mar 30, 2006
KLA-Tencor Technologies Corporation
James A. Smith
G06 - COMPUTING CALCULATING COUNTING