Erik Marie Jose Smeets

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Prinsenbeek, NL

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Patents Grantslast 30 patents

Information Patent Grant
Substrate distortion measurement
- Patent number 9,645,512
- Issue date May 9, 2017
- ASML Netherlands B.V.
- Erik Marie Jose Smeets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Substrate distortion measurement
- Publication number 20070008531
- Publication date Jan 11, 2007
- ASML NETHERLANDS B.V.
- Erik Marie Jose Smeets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measurement substrate, substrate table, lithographic apparatus, met...
- Publication number 20060085161
- Publication date Apr 20, 2006
- ASML Netherlands B.V.
- Erik Marie Jose Smeets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20040135099
- Publication date Jul 15, 2004
- ASML NETHERLANDS B.V.
- Klaus Simon
- C40 - COMBINATORIAL CHEMISTRY