Erik Matthias Sohmen

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Illumination system and projection objective of a mask inspection a...
- Patent number 10,114,293
- Issue date Oct 30, 2018
- Carl Zeiss SMT GmbH
- Heiko Feldmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM AND PROJECTION OBJECTIVE OF A MASK INSPECTION A...
- Publication number 20130038850
- Publication date Feb 14, 2013
- CARL ZEISS SMT GMBH
- Heiko Feldmann
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus and method
- Publication number 20080073596
- Publication date Mar 27, 2008
- ASML NETHERLANDS B.V.
- Antonius Theodorus Anna Maria Derksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY