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Erik Roelof Loopstra
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
11,378,893
Issue date
Jul 5, 2022
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection system and mirror and radiation source for a lithographi...
Patent number
11,150,560
Issue date
Oct 19, 2021
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G02 - OPTICS
Information
Patent Grant
Mask assembly
Patent number
11,009,803
Issue date
May 18, 2021
ASML Netherlands B.V.
Matthias Kruizinga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,962,891
Issue date
Mar 30, 2021
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method
Patent number
10,884,339
Issue date
Jan 5, 2021
ASML Netherlands B.V.
Wouter Joep Engelen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,838,310
Issue date
Nov 17, 2020
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,788,755
Issue date
Sep 29, 2020
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Active drying station and method to remove immersion liquid using g...
Patent number
10,761,438
Issue date
Sep 1, 2020
ASML Netherlands B.V.
Bob Streefkerk
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Projection system and mirror and radiation source for a lithographi...
Patent number
10,732,511
Issue date
Aug 4, 2020
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,678,139
Issue date
Jun 9, 2020
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dual stage lithographic apparatus and device manufacturing method
Patent number
RE47943
Issue date
Apr 14, 2020
ASML Netherlands B.V.
Marinus Aart Van Den Brink
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,620,545
Issue date
Apr 14, 2020
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Beam delivery apparatus and method
Patent number
10,580,545
Issue date
Mar 3, 2020
ASML Netherlands B.V.
Vadim Yevgenyevich Banine
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Mask assembly
Patent number
10,558,129
Issue date
Feb 11, 2020
ASML Netherlands B.V.
Matthias Kruizinga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle attachment apparatus
Patent number
10,539,886
Issue date
Jan 21, 2020
ASML Netherlands B.V.
Frits Van Der Meulen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,527,955
Issue date
Jan 7, 2020
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Position measurement of optical elements in a lithographic apparatus
Patent number
10,509,325
Issue date
Dec 17, 2019
Carl Zeiss SMT GmbH
Erik Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,503,084
Issue date
Dec 10, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging optical system and projection exposure installation for mic...
Patent number
10,481,500
Issue date
Nov 19, 2019
Carl Zeiss SMT GmbH
Hans-Juergen Mann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Graphene spectral purity filter
Patent number
10,481,510
Issue date
Nov 19, 2019
ASML Netherlands B.V.
Andrei Mikhailovich Yakunin
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,466,595
Issue date
Nov 5, 2019
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method
Patent number
10,437,154
Issue date
Oct 8, 2019
ASML Netherlands B.V.
Andrey Alexandrovich Nikipelov
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,345,712
Issue date
Jul 9, 2019
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,261,428
Issue date
Apr 16, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,254,663
Issue date
Apr 9, 2019
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,248,034
Issue date
Apr 2, 2019
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,222,706
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflector
Patent number
10,216,101
Issue date
Feb 26, 2019
ASML Netherlands B.V.
Han-Kwang Nienhuys
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection system and minor and radiation source for a lithographic...
Patent number
10,216,093
Issue date
Feb 26, 2019
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,191,389
Issue date
Jan 29, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20210063898
Publication date
Mar 4, 2021
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection System and Mirror and Radiation Source for a Lithographi...
Publication number
20200285155
Publication date
Sep 10, 2020
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20200225590
Publication date
Jul 16, 2020
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus, Lithographic Projection Apparatus and Devic...
Publication number
20200209757
Publication date
Jul 2, 2020
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pellicle Attachment Apparatus
Publication number
20200096882
Publication date
Mar 26, 2020
ASML NETHERLANDS B.V.
Frits VAN DER MEULEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask Assembly
Publication number
20200057394
Publication date
Feb 20, 2020
ASML NETHERLANDS B.V.
Matthias KRUIZINGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pellicle Attachment Apparatus
Publication number
20200012204
Publication date
Jan 9, 2020
ASML NETHERLANDS B.V.
Frits Van Der Meulen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190324374
Publication date
Oct 24, 2019
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC METHOD
Publication number
20190302625
Publication date
Oct 3, 2019
ASML NETHERLANDS B.V.
Wouter Joep ENGELEN
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190302631
Publication date
Oct 3, 2019
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190265596
Publication date
Aug 29, 2019
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190250518
Publication date
Aug 15, 2019
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20190235397
Publication date
Aug 1, 2019
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190227444
Publication date
Jul 25, 2019
ASML NETHERLANDS B.V.
Christiaan Alexander HOOGENDAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190212661
Publication date
Jul 11, 2019
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection System and Mirror and Radiation Source for a Lithographi...
Publication number
20190171109
Publication date
Jun 6, 2019
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190086819
Publication date
Mar 21, 2019
ASML NETHERLANDS B.V.
Erik Roelof LOOPSTRA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS
Publication number
20190086813
Publication date
Mar 21, 2019
Carl Zeiss SMT GMBH
Erik Loopstra
G02 - OPTICS
Information
Patent Application
Mask Assembly
Publication number
20180329314
Publication date
Nov 15, 2018
Matthias KRUIZINGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION BEAM APPARATUS
Publication number
20180314164
Publication date
Nov 1, 2018
ASML NETHERLANDS B.V.
Jeroen DEKKERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL APPARATUS FOR USE IN PHOTOLITHOGRAPHY
Publication number
20180275526
Publication date
Sep 27, 2018
Carl Zeiss SMT GMBH
Yim-Bun Patrick Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FOR RETICLE AND MULTILAYER MIRROR
Publication number
20180259846
Publication date
Sep 13, 2018
ASML Netherlands B.V.
Andrei Mikhailovich Yakunin
B82 - NANO-TECHNOLOGY
Information
Patent Application
REFLECTOR
Publication number
20180239252
Publication date
Aug 23, 2018
ASML NETHERLANDS B.V.
Han-Kwang NIENHUYS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180203364
Publication date
Jul 19, 2018
ASMLNETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180129143
Publication date
May 10, 2018
ASML NETHERLANDS B.V.
Christiaan Alexander HOOGENDAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC METHOD
Publication number
20180081278
Publication date
Mar 22, 2018
ASML NETHERLANDS B.V.
Andrey Alexandrovich NIKIPELOV
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180046089
Publication date
Feb 15, 2018
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION SYSTEM
Publication number
20180031982
Publication date
Feb 1, 2018
ASML NETHERLANDS B.V.
Han-Kwang NIENHUYS
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170343904
Publication date
Nov 30, 2017
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Electron Injector and Free Electron Laser
Publication number
20170264071
Publication date
Sep 14, 2017
ASML NETHERLANDS B.V.
Andrey Alexandrovich NIKIPELOV
H01 - BASIC ELECTRIC ELEMENTS