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Erik Tarvin
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South Boston, MA, US
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last 30 patents
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Patent Grant
Method for capping a MEMS wafer
Patent number
8,058,144
Issue date
Nov 15, 2011
Analog Devices, Inc.
Milind Bhagavat
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Capped wafer method and apparatus
Patent number
7,981,723
Issue date
Jul 19, 2011
Analog Devices, Inc.
Xue'en Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Capped Wafer Method and Apparatus
Publication number
20100117221
Publication date
May 13, 2010
Analog Devices, Inc.
Xue'en Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Method for Capping a MEMS Wafer
Publication number
20090294879
Publication date
Dec 3, 2009
Analog Devices, Inc.
Milind Bhagavat
B81 - MICRO-STRUCTURAL TECHNOLOGY